Bachelor's Thesis
Surface contamination of optical elements studied by Low Energy Ion Scattering LEIS
Final Thesis 6.68 MB Appendix 1.06 MBAuthor of thesis: Ing. Filip Sekula
Acad. year: 2018/2019
Supervisor: doc. Ing. Stanislav Průša, Ph.D.
Reviewer: prof. Ing. Miroslav Kolíbal, Ph.D.
Abstract:This thesis focuses on study of surface contamination of optical elements using the low energy ion scattering method, LEIS. Presence of surface contaminations on optical elements has a negative contribution on thin layers that are applied upon them. The contamination can occur between the steps of manufacturing process. By determining the composition of the contaminations it could be possible to increase effectiveness during the growth of thin layers. Measurement is realised on right angle prisms at room temperature. We also focus on construction of sample holder that would allow heating of samples in the preparation chamber. Later we measure reference spectra for quantification of surface contamination.
LEIS, sample holder, sample heating, surface contamination, optical elements
Date of defence
20.06.2019
Result of the defence
Defended (thesis was successfully defended)
Grading
B
Process of defence
Po otázkách oponenta bylo dále diskutováno: Zákon zachování energie při binární srážce.
Language of thesis
Czech
Faculty
Department
Study programme
Applied Sciences in Engineering (B3A-P)
Field of study
Physical Engineering and Nanotechnology (B-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda)
prof. RNDr. Miroslav Liška, DrSc. (místopředseda)
doc. Ing. Stanislav Průša, Ph.D. (člen)
prof. RNDr. Petr Dub, CSc. (člen)
prof. RNDr. Radim Chmelík, Ph.D. (člen)
prof. RNDr. Jiří Spousta, Ph.D. (člen)
doc. Ing. Radek Kalousek, Ph.D. (člen)
prof. RNDr. Pavel Zemánek, Ph.D. (člen)
RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s report
doc. Ing. Stanislav Průša, Ph.D.
Grade proposed by supervisor: A
Reviewer’s report
prof. Ing. Miroslav Kolíbal, Ph.D.
Grade proposed by reviewer: C