Bachelor's Thesis
Design of automated set-up intended for inspection of PMMA coated silicon wafers
Final Thesis 7.06 MBAuthor of thesis: Ing. Michal Drozd
Acad. year: 2019/2020
Supervisor: doc. Ing. Alexandr Knápek, Ph.D.
Reviewer: doc. Mgr. Dinara Sobola, Ph.D.
Abstract:During the coating the substrate with a thin layer of polymer resist several defects can to occur which could damage an exposure by electron beam lithography. The quality of the resist-coated surface prior to the exposure is also very important in terms of the final functionality of the fabricated micro device. The quality of the resist-coated surface can be measured by means of human visual inspection with a visible-light microscope. This bachelor's thesis is focused on the design and assembly of the automated set-up to do this inspection automatically.
More precisely, the designed set-up is called WaferScan and it allows to scan a silicon wafer coated with a resist layer. The wafer surface is scanned with an optical camera and the taken images are analyzed using computer to determine the location and the size of the defects and the dust particles in the resist layer. The entire device consists of two moving axes, x and y, (that allow the movement of the camera) and a control electronic circuitry. Software to control the scanning device and the image processing tool were also developed.
e-beam lithography, EBL, resist discontinuities, quality control, image processing
Date of defence
16.07.2020
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Process of defence
Po otázkách oponenta bylo dále diskutováno: Konstrukční řešení posuvů stolku. Student otázky zodpověděl.
Language of thesis
English
Faculty
Department
Study programme
Applied Sciences in Engineering (B3A-P)
Field of study
Physical Engineering and Nanotechnology (B-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda)
prof. RNDr. Miroslav Liška, DrSc. (místopředseda)
prof. RNDr. Bohumila Lencová, CSc. (člen)
doc. Ing. Radek Kalousek, Ph.D. (člen)
prof. RNDr. Petr Dub, CSc. (člen)
prof. RNDr. Radim Chmelík, Ph.D. (člen)
prof. RNDr. Jiří Spousta, Ph.D. (člen)
RNDr. Antonín Fejfar, CSc. (člen)
prof. RNDr. Pavel Zemánek, Ph.D. (člen)
doc. Ing. Stanislav Průša, Ph.D. (člen)
Supervisor’s report
doc. Ing. Alexandr Knápek, Ph.D.
Grade proposed by supervisor: A
Reviewer’s report
doc. Mgr. Dinara Sobola, Ph.D.
Grade proposed by reviewer: A