Projekt je zaměřen na vývoj unikátního rentgenového tomografu (XCT) s prostorovým rozlišením pod 100 nm a vysokým aplikačním potenciálem pro elektrotechnický průmysl.

Popis anglicky
The project has two objectives. The first objective is to develop an X-ray camera for a nanoXCT system with a world-class spatial resolution of less than 100 nm and applications in microelectronics. Two functional samples, a scintillation detector, and X-ray camera will be prepared within 3 years. The X-ray camera will be protected as an industrial sample. The second objective encompasses development of correlative methods for tomographic analysis of structures. In particular, workflow integration and evaluation of materials and structures in microelectronics will be a key topic. The project will promote collaboration among partners with the IKTS in Germany. The result enables the creation of a tomographic system (nanoXCT) and methods for defect inspection in microelectronic components.

Klíčová slova
detektory ionizující záření; rtg kamera; nanoCT

Klíčová slova anglicky
Ionizing radiation detectors, X-ray camera, nanoCT, correlation, tomography, 3D analysis, SIMS, XCT, SPM, SEM, AES, electron and ion imaging, microelectronics industry, defect analysis, failure analysis