The project "Advanced Design of Opto-Mechanical Systems" focuses on the design of diffraction-limited optical assemblies with advanced mechanical design and sub-micron precision positioning of optical components. The activities will build on the topics developed in the CEPO project. Methods for simulations of optical and mechanical components (parasitic stress in optics, prediction of aberrations from temperature, vibrational behaviour of assemblies) will be developed. Other activities will focus on stress-free storage of optics, coupling of optics to mechanics by soldering, high-precision positioning, automation of alignment, reduction of vibration effects and application of composite materials in the support structures of opto-mechanical assemblies. All activities of the sub-project are aimed at the development of lithography and inspection in the DUV (Deep Ultra Violet) spectra region.

Klíčová slova
Opto-Mechanical System