The project will clarify open issues in plasma enhanced chemical vapor deposition (PECVD) of amine plasma polymers (amine PPs) and approach the role of ions in the creation of free radicals, unsaturated bonds, hydrogen concentration, besides other usually discussed film characteristics, e.g., N/C ratio, NH2 concentration, and oxygen impurity. The research will concentrate on the low pressure radio-frequency (RF) capacitively and inductively coupled plasmas, the most used discharges in the PECVD of amine PPs. We will vary the experimental arrangements to modify the ion energy flux towards the growing films and check the relation of the RF power and energy flux to the film structure, and stability in aqueous media. Uniquely, we will study the lifetime of free radicals in a wide range of amine PPs, and the effect of radicals and unsaturated bonds on film reactivity. The project will provide a deeper understanding of plasma processes leading to materials successfully demonstrated in several biomedical applications.

Klíčová slova
amine plasma polymers;ions;free radicals;cross-linking