Detail publikace

The formation of Self-organized 3-d Arrays of Semiconductor Metal-oxide Nanocolumns for Advanced Sensor Applications

MOZALEV, A. BENDOVA, M. HRDY, R. PYTLICEK, Z. HUBALEK, J.

Originální název

The formation of Self-organized 3-d Arrays of Semiconductor Metal-oxide Nanocolumns for Advanced Sensor Applications

Typ

konferenční sborník (ne článek)

Jazyk

angličtina

Originální abstrakt

In this work electrochemical anodizing has been employed to synthesize, for the first time, a three-dimensional nanostructured column-like metal-oxide semiconductor film in which a change in the conductivity along the columns, assembled between the two parallel metal electrodes, is the controlling factor during chemisorption reactions when a gas penetrates such a film. To demonstrate the technology capability, several types of unique niobium-oxide-nanocolumn arrays have been synthesized via multistep anodic processing of an Al/Nb thin-film bilayer sputter-deposited onto oxidized Si substrates and additionally tailoring their parameters by combining chemical dissolution and high-temperature annealing. The films formation-structure-property relationship has been studied in pursuit of altering the film properties and discovering new functionalities for potential application to advanced micro and nanosensors

Klíčová slova

3-D nanostructures, self-organized film, electrochemical anodizing, anodic oxide films, porous anodic alumina, niobium oxide, functional properties, gas sensor

Autoři

MOZALEV, A.; BENDOVA, M.; HRDY, R.; PYTLICEK, Z.; HUBALEK, J.

Vydáno

2. 5. 2013

Místo

University of Žilina, Slovakia

ISBN

978-80-554-0689-3

Kniha

Proceedings of the International Conference on Advances in Electronic and Photonic Technologies

Edice

D. Pudiš

Strany od

7

Strany do

10

Strany počet

4

BibTex

@proceedings{BUT100920,
  editor="Alexander {Mozalev} and Mária {Bendová} and Radim {Hrdý} and Zdeněk {Pytlíček} and Jaromír {Hubálek}",
  title="The formation of Self-organized 3-d Arrays of Semiconductor Metal-oxide Nanocolumns for Advanced Sensor Applications",
  year="2013",
  series="D. Pudiš",
  pages="7--10",
  address="University of Žilina, Slovakia",
  isbn="978-80-554-0689-3"
}