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SIDEROV, V. MLADENOVA, D. MILENKOV, V. OHLÍDAL, M. SALYK, O. WEITER, M. ZHIVKOV, I.
Originální název
Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT
Typ
abstrakt
Jazyk
angličtina
Originální abstrakt
This paper compares Chromatic White Light (CWL) and stylus profilometer measurements in an attempt to determine the capabilities of the non-contact CWL method for thickness measurements of thin soft organic films. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films were recorded and processed by digital calculations and Fourier filtering.
Klíčová slova
Chromatic White Light, Thin Soft Organic Films, Film Thickness Measurement
Autoři
SIDEROV, V.; MLADENOVA, D.; MILENKOV, V.; OHLÍDAL, M.; SALYK, O.; WEITER, M.; ZHIVKOV, I.
Vydáno
17. 10. 2013
Strany od
48
Strany do
Strany počet
1
BibTex
@misc{BUT102465, author="Vasil {Siderov} and Daniela {Mladenova} and Viktor {Milenkov} and Miloslav {Ohlídal} and Ota {Salyk} and Martin {Weiter} and Ivaylo {Zhivkov}", title="Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT", booktitle="Jubilee Scientific Session {"}Interdisciplinaty Chemistry{"}", year="2013", pages="48--48", note="abstract" }