Detail publikace

Film thickness measurement by optical profilometer MicroProf FRTMicroProf FRT

SIDEROV, V. MLADENOVA, D. YORDANOV, R. MILENKOV, V. OHLÍDAL, M. SALYK, O. WEITER, M. ZHIVKOV, I.

Originální název

Film thickness measurement by optical profilometer MicroProf FRTMicroProf FRT

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

This paper compares Chromatic White Light (CWL) and stylus profilometer measurements in an attempt to determine the capabilities of the non-contact CWL method for thickness measurements of thin soft organic films. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films were recorded and processed by digital calculations and Fourier filtering.

Klíčová slova

Chromatic White Light, Thin Soft Organic Films, Film Thickness Measurement

Autoři

SIDEROV, V.; MLADENOVA, D.; YORDANOV, R.; MILENKOV, V.; OHLÍDAL, M.; SALYK, O.; WEITER, M.; ZHIVKOV, I.

Rok RIV

2013

Vydáno

25. 11. 2013

Místo

Bulgaria

ISSN

0324-1130

Periodikum

BULGARIAN CHEMICAL COMMUNICATIONS

Ročník

45

Číslo

B

Stát

Bulharská republika

Strany od

194

Strany do

197

Strany počet

4

BibTex

@article{BUT102499,
  author="SIDEROV, V. and MLADENOVA, D. and YORDANOV, R. and MILENKOV, V. and OHLÍDAL, M. and SALYK, O. and WEITER, M. and ZHIVKOV, I.",
  title="Film thickness measurement by optical profilometer MicroProf FRTMicroProf FRT",
  journal="BULGARIAN CHEMICAL COMMUNICATIONS",
  year="2013",
  volume="45",
  number="B",
  pages="194--197",
  issn="0324-1130"
}