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PEKÁREK, J. VRBA, R. MAGÁT, M. CHOMOUCKÁ, J. PRÁŠEK, J. HUBÁLEK, J. JAŠEK, O. ZAJÍČKOVÁ, L.
Originální název
Carbon Nanotube Emitters in Sensoric Application
Typ
konferenční sborník (ne článek)
Jazyk
angličtina
Originální abstrakt
A contemporary approach to study the emission properties of carbon nanotubes (CNTs) in low distances between two electrodes is described in this paper. The method could be used in modern MEMS pressure sensor applications. The field emission works on the principle that the field emission current is correlated with the electrical field intensity, i.e., the anode-emitter distance when the applied voltage is fixed. This means that the CNTs array serves as the emitter source of electrons between the cathode and the anode in the electric field. The measurement of emission current density flowing through the electrodes is carried out in a vacuum chamber pumped by a turbomolecular pump. The vacuum chamber is equipped with a linear nano-motion drive SmarAct that enables precise changes of the distance between two electrodes inside the vacuum chamber (step width from 50 nm to 1000 nm, sub-nanometer resolution). For this experiment, CNTs are deposited using a thermal chemical vapour deposition.
Klíčová slova
carbon nanotubes; emission properies; thermal chemical vapour deposition; microwave torch deposition
Autoři
PEKÁREK, J.; VRBA, R.; MAGÁT, M.; CHOMOUCKÁ, J.; PRÁŠEK, J.; HUBÁLEK, J.; JAŠEK, O.; ZAJÍČKOVÁ, L.
Vydáno
25. 8. 2013
Nakladatel
IARIA
Místo
Barcelona
ISBN
978-1-61208-303-2
Kniha
Conference Proceedings - ICQNM 2013
Edice
1
Strany od
67
Strany do
70
Strany počet
4
BibTex
@proceedings{BUT102638, editor="Jan {Pekárek} and Radimír {Vrba} and Martin {Magát} and Jana {Pekárková} and Jan {Prášek} and Jaromír {Hubálek} and Ondřej {Jašek} and Lenka {Zajíčková}", title="Carbon Nanotube Emitters in Sensoric Application", year="2013", series="1", pages="67--70", publisher="IARIA", address="Barcelona", isbn="978-1-61208-303-2" }