Detail publikace

Microfabrication of flexible gas sensing devices based on nanostructured semiconducting metal oxides

VALLEJOS VARGAS, S. Gracia, I Figueras, E. Sanchez, J. Mas, R.Beldarrain, O. Cane, C.

Originální název

Microfabrication of flexible gas sensing devices based on nanostructured semiconducting metal oxides

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Flexible gas sensor devices comprised of heating and transducing elements are produced by directly integrating multilayer polymeric-based platforms and highly crystalline semiconducting metal oxide nanostructures grown via vapour-phase method, as main improvement over other methods for fabricating flexible gas sensors. Thermal simulations and characterizations of the heating element demonstrate these devices provide uniform temperature distribution at the sensing active area, and the electrical properties of the sensing film and electrodes indicate the networked-nanostructures are ohmically connected. Validation of the sensing device shows repeatable and satisfactory responses towards ethanol, demonstrating this fabrication method, with potential in a cost effective production for large-scale applications, is an attractive route for developing next generation of gas sensing devices provided of flexibility and functionality.

Klíčová slova

Flexible gas sensors; Nanostructures; Tungsten oxide; AACVD

Autoři

VALLEJOS VARGAS, S.; Gracia, I; Figueras, E.; Sanchez, J. ; Mas, R.;Beldarrain, O.; Cane, C.

Rok RIV

2014

Vydáno

1. 11. 2014

Nakladatel

ELSEVIER SCIENCE SA

Místo

O BOX 564, 1001 LAUSANNE, SWITZERLAND

ISSN

0924-4247

Periodikum

Sensors and Actuators

Ročník

219

Číslo

1

Stát

Švýcarská konfederace

Strany od

88

Strany do

93

Strany počet

6

URL

http://www.sciencedirect.com/science/article/pii/S0924424714003963

BibTex

@article{BUT110871,
  author="VALLEJOS VARGAS, S. and Gracia, I and Figueras, E. and Sanchez, J. and Mas, R. and Beldarrain, O. and Cane, C.",
  title="Microfabrication of flexible gas sensing devices based on nanostructured semiconducting metal oxides",
  journal="Sensors and Actuators",
  year="2014",
  volume="219",
  number="1",
  pages="88--93",
  doi="10.1016/j.sna.2014.09.001",
  issn="0924-4247",
  url="http://www.sciencedirect.com/science/article/pii/S0924424714003963"
}