Detail publikace

Nanostructures Fabrication using Self-Ordering Techniques

HUBÁLEK, J.

Originální název

Nanostructures Fabrication using Self-Ordering Techniques

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM).

Klíčová slova

Self-ordering, nanopores, nanorods, nanowires

Autoři

HUBÁLEK, J.

Rok RIV

2004

Vydáno

9. 9. 2004

Nakladatel

Ing. Zdeněk Novotný, CSc.

Místo

Brno

ISBN

80-214-2701-9

Kniha

The 11th Electronic Devices and Systems

Číslo edice

první

Strany od

260

Strany do

264

Strany počet

5

BibTex

@inproceedings{BUT11425,
  author="Jaromír {Hubálek}",
  title="Nanostructures Fabrication using Self-Ordering Techniques",
  booktitle="The 11th Electronic Devices and Systems",
  year="2004",
  volume="11",
  number="první",
  pages="5",
  publisher="Ing. Zdeněk Novotný, CSc.",
  address="Brno",
  isbn="80-214-2701-9"
}