Přístupnostní navigace
E-přihláška
Vyhledávání Vyhledat Zavřít
Detail publikace
VEJMOLA, T. YAHYA, D. ŠANDERA, J.
Originální název
Mechanical and electrical properties of evaporated thin layers
Typ
článek v časopise - ostatní, Jost
Jazyk
angličtina
Originální abstrakt
The study deals with the vacuum evaporation technique of thin layers, considering different process parameters and their influence on electrical properties. Parameters, such as temperature, different substrate types, substrate vibrations, etc., are considered. The effects of the process parameters on the coating structure are observed. The temperature affects the coating quality and stability [1] [2]. Regarding electrical properties, the surface resistivity is measured by four-point method, whereas the influence of process parameters on the surface resistivity is determined as well.
Klíčová slova
thin layers vacuum evaporation mechanical properties electrical properties electrical measurements
Autoři
VEJMOLA, T.; YAHYA, D.; ŠANDERA, J.
Rok RIV
2014
Vydáno
5. 12. 2014
ISSN
1802-4564
Periodikum
ElectroScope - http://www.electroscope.zcu.cz
Ročník
Číslo
3
Stát
Česká republika
Strany od
1
Strany do
4
Strany počet
URL
https://otik.uk.zcu.cz/bitstream/handle/11025/11824/Vejmola.pdf?sequence=1
BibTex
@article{BUT114331, author="Tomáš {Vejmola} and Doaa {W. F. Yahya} and Josef {Šandera}", title="Mechanical and electrical properties of evaporated thin layers", journal="ElectroScope - http://www.electroscope.zcu.cz", year="2014", volume="2014", number="3", pages="1--4", issn="1802-4564", url="https://otik.uk.zcu.cz/bitstream/handle/11025/11824/Vejmola.pdf?sequence=1" }