Detail publikace

Nonlitographic Nanostructured Film Fabrication

HUBÁLEK, J.

Originální název

Nonlitographic Nanostructured Film Fabrication

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM).

Klíčová slova

Self-ordering, nanopores, nanorods, nanowires

Autoři

HUBÁLEK, J.

Rok RIV

2004

Vydáno

16. 6. 2004

Nakladatel

IMAPS CZ&SK chapter

Místo

Lanškroun

ISBN

80-239-2835-X

Kniha

3rd European Microelectrinics and Packaging Symposium

Strany od

495

Strany do

500

Strany počet

6

BibTex

@inproceedings{BUT11522,
  author="Jaromír {Hubálek}",
  title="Nonlitographic Nanostructured Film Fabrication",
  booktitle="3rd European Microelectrinics and Packaging Symposium",
  year="2004",
  volume="první",
  pages="6",
  publisher="IMAPS CZ&SK chapter",
  address="Lanškroun",
  isbn="80-239-2835-X"
}