Detail publikace

Temperature and Sensitivity Analysis on MEMS Vibration Sensors with Different Principles of Operation

KLUSÁČEK, S. HAVRÁNEK, Z. HASÍK, S. FIALKA, J. BENEŠ, P.

Originální název

Temperature and Sensitivity Analysis on MEMS Vibration Sensors with Different Principles of Operation

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

This article describes the experimental research on qualitative parameter validation of MEMS-based vibration sensors. The aim of the paper is to compare three MEMS vibration sensors with different principles of operation; the investigated samples represent major principles used in currently available MEMS accelerometers, namely the capacitive (STMicroelectronics LIS3L06AL), thermal (MEMSIC MXA6500M), and piezoresistive (Panasonic AGS61331) approaches. The actual comparison of the examined objects was performed using primary and secondary methods for the calibration of vibration sensors. In the first experiment, we measured the sensitivity and frequency characteristics within the operating range of the accelerometers, applying the primary methods to compare the investigated MEMS objects. At the following stage, the results yielded from the monitoring of temperature effects and their analysis based on the secondary calibration methods were utilized to verify the sensitivity and temperature dependences of the MEMS accelerometers. Within the paper, the measured characteristics are compared to the related catalog datasheets, and the possibilities of suppressing the temperature effects are discussed to finalize the overall presentation of the problem.

Klíčová slova

MEMS, vibration sensors, calibration, temperature analysis, sensitivity analysis

Autoři

KLUSÁČEK, S.; HAVRÁNEK, Z.; HASÍK, S.; FIALKA, J.; BENEŠ, P.

Rok RIV

2015

Vydáno

12. 7. 2015

Nakladatel

International Institute of Acoustic and Vibration

Místo

Florencie, Itálie

ISBN

978-88-88942-48-3

Kniha

Proceedings of the 22nd International Congress on Sound and Vibration

ISSN

2329-3675

Periodikum

International Journal of Acoustic and Vibration

Ročník

2015

Stát

Spojené státy americké

Strany od

1

Strany do

8

Strany počet

8

URL

http://icsv22.org/

BibTex

@inproceedings{BUT115788,
  author="Stanislav {Klusáček} and Zdeněk {Havránek} and Stanislav {Hasík} and Jiří {Fialka} and Petr {Beneš}",
  title="Temperature and Sensitivity Analysis on MEMS Vibration Sensors with Different Principles of Operation
",
  booktitle="Proceedings of the 22nd International Congress on Sound and Vibration",
  year="2015",
  journal="International Journal of Acoustic and Vibration",
  volume="2015",
  pages="1--8",
  publisher="International Institute of Acoustic and Vibration",
  address="Florencie, Itálie",
  isbn="978-88-88942-48-3",
  issn="2329-3675",
  url="http://icsv22.org/"
}