Hardcoating of parylene protective layers

abstrakt

angličtina

Many metallic archaeological artifacts are not protected effectively against corrosion. There is an effort to prepare protective layer with good barrier properties in order to stop creation of corrosion centers and the corrosion propagation as well. Material for those applications must be easily removable (there is a requirement for later analysis and treatment of artefacts) and mainly transparent (because of further exhibition in museums). There is also arequirementthat the treatmentmust not harmthe sample or sample surface (degradation or other damage). According to our experiments and literature research, poly-paraxylylene based film (type Parylene C) deposited on metallic substrates by Chemical Vapor Deposition [1] was chosen as promising material for archaeological artefacts preservation. Parylene C films have great barrier properties [2] against vapors and gases (like nitrogen, oxygen, CO2, etc.) as well as good optical and dielectric properties. In other hand the polymer layer hassufficient hardnessand mechanical resistance against scratching during manipulation. Therefore the work is focused on deposition of an additional protective hard coating layer based on SiO-like coating for improving properties such as scratch resistance of structured layer. The optimization of thin film preparation process was carried out in order to obtain functional protection system. The properties of the entire sandwich structures were analyzed using various technics, such as microscratch test, nanoindentation techniques and corrosion test.

Chemical vapour deposition, Parylene C, SiOx, nanoindentation

HORÁK, J.; PROCHÁZKA, M.; PEKÁREK, J.; PŘIKRYL, R.; KRČMA, F.

6. 9. 2015

Padova University

Padova

978-88-6938-045-7

6th Central European Symposium on Plasma Chemistry: Scientific Program & Book of Abstracts

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