Detail publikace

Trajectories of Signal Electrons in Low-Voltage BSE Detector

WANDROL, P., AUTRATA, R.

Originální název

Trajectories of Signal Electrons in Low-Voltage BSE Detector

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Nowadays the development of the image formation in SEM is oriented to the use of scanning electron microscopes with low accelerating voltage of the primary beam (LV SEM). Secondary electrons and backscattered electrons (BSE) are the main components of detected signal in LV SEM. While secondary electrons can be detected either by ET or "in lens" detector, the detection of BSE in LV SEM is an unsolved problem yet.

Klíčová slova v angličtině

low-voltage scanning electron microscopy, signal electrons trajectories, low-voltage BSE detector

Autoři

WANDROL, P., AUTRATA, R.

Rok RIV

2004

Vydáno

12. 7. 2004

Nakladatel

Ústav přístrojové techniky AC ČR

Místo

Brno

ISBN

80-239-3246-2

Kniha

Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

Číslo edice

9.

Strany od

77

Strany do

78

Strany počet

2

BibTex

@inproceedings{BUT11801,
  author="Petr {Wandrol} and Rudolf {Autrata}",
  title="Trajectories of Signal Electrons in Low-Voltage BSE Detector",
  booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation",
  year="2004",
  number="9.",
  pages="2",
  publisher="Ústav přístrojové techniky AC ČR",
  address="Brno",
  isbn="80-239-3246-2"
}