Detail publikace

New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM

AUTRATA, R., SCHAUER, P., WANDROL, P.

Originální název

New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Detection of backscattered electrons (BSE) in scanning electron microscopy (SEM) serves as an auxiliary method in the study of surfaces and composition of materials. BSE have properties that are different from those of usually used secondary electrons (SE). The achievement of the theoretical limit of resolution (0,6 - 0,8 nm for SE and 0,9 nm for BSE) depends not only on the properties of electron source, properties of electron optics, specimen preparation technique, type of electrons, but also on the detection system efficiency.

Klíčová slova

scanning electron microscopy, YAG scintillator, backscattered electrons

Autoři

AUTRATA, R., SCHAUER, P., WANDROL, P.

Rok RIV

2004

Vydáno

12. 7. 2004

Nakladatel

Ústav přístrojové techniky AC ČR

Místo

Brno

ISBN

80-239-3246-2

Kniha

Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

Strany od

11

Strany do

12

Strany počet

2

BibTex

@inproceedings{BUT11809,
  author="Rudolf {Autrata} and Petr {Schauer} and Petr {Wandrol}",
  title="New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM",
  booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation",
  year="2004",
  pages="2",
  publisher="Ústav přístrojové techniky AC ČR",
  address="Brno",
  isbn="80-239-3246-2"
}