Detail publikace

Non-silicon MEMS platforms for gas sensors

VASILIEV, A. PISLIAKOV, A. SOKOLOV, A. SAMOTAEV, N. SOLOVIEV, S. OBLOV, K. GUARNIERI, V. LORENZELLI, L. BRUNELLI, J. MAGLIONE, A. LIPILIN, A. MOZALEV, A. LEGIN, A.

Originální název

Non-silicon MEMS platforms for gas sensors

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

The aim of this work is the demonstration of advanced approaches able to provide non-silicon MEMS platforms for chemical sensor operating under harsh environmental conditions and, on the other hand, to assure microhotplate stable at high temperature, which can be used for the deposition of refractory gas-sensing materials, for example, oxides of gallium, zirconium, or hafnium. Non-silicon materials that can be used for these MEMS platforms include aluminum oxide, yttria-stabilized zirconia and thin borosilicateglass. It was shown that thin ceramic films made of oxide materials can withstand annealing temperature up to 1000 degrees, MEMS sensor based on these films consumes less than 70 mW at continuous heating at 450 degrees and 1 mW in pulsed heating operation mode. Ceramic MEMS show higher stability at high temperaturec ompared with silicon technology based MEMS, whereas power consumption of both types of devices is comparable.

Klíčová slova

Microhotplates, Gas sensors, Ceramic MEMS

Autoři

VASILIEV, A.; PISLIAKOV, A.; SOKOLOV, A.; SAMOTAEV, N.; SOLOVIEV, S.; OBLOV, K.; GUARNIERI, V.; LORENZELLI, L.; BRUNELLI, J.; MAGLIONE, A.; LIPILIN, A.; MOZALEV, A.; LEGIN, A.

Vydáno

1. 3. 2016

Nakladatel

Elsevier B.V.

Místo

Netherlands, Radarweg 29, Amsterdam 1043 NX

ISSN

0925-4005

Periodikum

Sensors and Actuators B: Chemical

Ročník

224

Číslo

1

Stát

Švýcarská konfederace

Strany od

700

Strany do

713

Strany počet

14

URL

http://dx.doi.org/10.1016/j.snb.2015.10.066

BibTex

@article{BUT120403,
  author="Alexey {Vasiliev} and Alexandr {Pisliakov} and Andrey {Sokolov} and Nikolay {Samotaev} and Sergey {Soloviev} and Konstantin {Oblov} and Vittorio {Guarnieri} and Leandro {Lorenzelli} and Jacopo {Brunelli} and Alfredo {Maglione} and Alexandr {Lipilin} and Alexander {Mozalev} and Andrey {Legin}",
  title="Non-silicon MEMS platforms for gas sensors",
  journal="Sensors and Actuators B: Chemical",
  year="2016",
  volume="224",
  number="1",
  pages="700--713",
  doi="10.1016/j.snb.2015.10.066",
  issn="0925-4005",
  url="http://dx.doi.org/10.1016/j.snb.2015.10.066"
}