Detail publikace

Tetrakis(trimethylsilyloxy)silane for nanostructured SiO2-like films deposited by PECVD at atmospheric pressure

SCHÄFER, J. HNILICA, J. ŠPERKA, J. QUADE, A. KUDRLE, V. FOEST, R. VODÁK, J. ZAJÍČKOVÁ, L.

Originální název

Tetrakis(trimethylsilyloxy)silane for nanostructured SiO2-like films deposited by PECVD at atmospheric pressure

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Plasma enhanced chemical vapor deposition (PECVD) from tetrakis(trimethylsilyloxy)silane (TTMS) has been studied at atmospheric pressure. TTMS has been chosen because of its unique 3D structure with potential to form nano-structured organosilicon polymers. Despite the widespread surveying of various silicon-organic molecules for PECVD, the use of TTMS in AP-PECVD has not been investigated deeper yet. PECVDs have been performed with two different plasma jets. While they are alike regarding the geometry and injection of TTMS, they differ in input power and excitation frequency. The radiofrequency plasma jet operates at lower power densities as compared to the microwave plasma jet. Despite this all the deposited films exhibit similar chemical properties resembling that of silicon dioxide (Si:O = 1:2) with carbon content below 5%. The films demonstrate a broad variety of morphologies from compact smooth films to nano-dendritic 3D structures depending on the particular process.

Klíčová slova

Tetrakis(trimethylsilyloxy)silane; Tetrakis(trimethylsiloxy)silane; Plasma jet; Silicon dioxide

Autoři

SCHÄFER, J.; HNILICA, J.; ŠPERKA, J.; QUADE, A.; KUDRLE, V.; FOEST, R.; VODÁK, J.; ZAJÍČKOVÁ, L.

Vydáno

15. 6. 2016

Nakladatel

ELSEVIER SCIENCE SA

Místo

SWITZERLAND

ISSN

0257-8972

Periodikum

Surface and Coatings Technology

Číslo

295

Stát

Švýcarská konfederace

Strany od

112

Strany do

118

Strany počet

6

URL

http://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=7&SID=X2jtspQlj86fzQeltyo&page=1&doc=1

BibTex

@article{BUT126920,
  author="Jan {Schäfer} and Jaroslav {Hnilica} and Jiří {Šperka} and Antje {Quade} and Vít {Kudrle} and Rüdiger {Foest} and Jiří {Vodák} and Lenka {Zajíčková}",
  title="Tetrakis(trimethylsilyloxy)silane for nanostructured SiO2-like films deposited by PECVD at atmospheric pressure",
  journal="Surface and Coatings Technology",
  year="2016",
  number="295",
  pages="112--118",
  doi="10.1016/j.surfcoat.2015.09.047",
  issn="0257-8972",
  url="http://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=7&SID=X2jtspQlj86fzQeltyo&page=1&doc=1"
}