Detail publikace

Flexible foils formed by a prolonged electron beam irradiation in scanning electron microscope

ČECHAL, J. ŠIKOLA, T.

Originální název

Flexible foils formed by a prolonged electron beam irradiation in scanning electron microscope

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

The ubiquitous presence of hydrocarbon contamination on solid surfaces alters their inherent physical properties and complicates the surface analyses. An irradiation of sample surface with electron beam can lead to the chemical transformation of the hydrocarbon layer to carbon films, which are flexible and capable of acting as a barrier for chemical etching of an underlying material. The growth of these foils is limited by supply of hydrocarbons to the writing beam position rather than the electron dose or electron beam current. The prepared films can find their applications in fabrication of surface nanostructures without a need of an electron sensitive resist material.

Klíčová slova

Adventitious carbon; Hydrocarbon contamination; Electron beam irradiation; Vacuum; Silicon dioxide, SiO2; Surface processes

Autoři

ČECHAL, J.; ŠIKOLA, T.

Vydáno

24. 6. 2017

ISSN

0169-4332

Periodikum

Applied Surface Science

Ročník

423

Číslo

1

Stát

Nizozemsko

Strany od

538

Strany do

541

Strany počet

4

BibTex

@article{BUT137792,
  author="Jan {Čechal} and Tomáš {Šikola}",
  title="Flexible foils formed by a prolonged electron beam irradiation in scanning electron microscope",
  journal="Applied Surface Science",
  year="2017",
  volume="423",
  number="1",
  pages="538--541",
  doi="10.1016/j.apsusc.2017.06.236",
  issn="0169-4332"
}