Detail publikace

Optical pressure sensors in LTCC technology

SOMER, J.

Originální název

Optical pressure sensors in LTCC technology

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

This paper deals with the design, manufacturing and measurement of optical pressure sensors developed in Low Temperature Co-fired Ceramic technology. Two types of the optical measurement methods were used for the pressure sensing. The first method is based on the distance measurement using Fabry Perot resonator. The second type of pressure transducer is based on the change of the light spectrum reflected from the Fiber Bragg Grating integrated in the sensor. LTCC ceramic structure with membrane was used for the forming of a pressure transducer. Both of the sensor types were designed to measure pressure in range of ± 0,5 bar difference atmospheric pressure.

Klíčová slova

Low Temperature Co-fired Ceramic, pressure sensors, Fabry-Perot resonator, Fiber Bragg Grating

Autoři

SOMER, J.

Vydáno

24. 5. 2017

ISBN

978-80-214-5496-5

Kniha

Proceedings of the 23rd Conference STUDENT EEICT 2017

Strany od

552

Strany do

556

Strany počet

707

BibTex

@inproceedings{BUT138615,
  author="Jakub {Somer}",
  title="Optical pressure sensors in LTCC technology",
  booktitle="Proceedings of the 23rd Conference STUDENT EEICT 2017",
  year="2017",
  pages="552--556",
  isbn="978-80-214-5496-5"
}