Detail publikace

Thin Films of Tetravinylsilane Characterized by Spectroscopic Ellipsometry

BRÁNECKÝ, M. ČECH, V.

Originální název

Thin Films of Tetravinylsilane Characterized by Spectroscopic Ellipsometry

Typ

abstrakt

Jazyk

angličtina

Originální abstrakt

We prepared thin films from vapor of tetravinylsilane (TVS) monomer using plasma-enhanced chemical vapor deposition (PECVD) with a process gas pressure of 2.7 Pa at a monomer flow rate of 3.8 sccm. Thin films were deposited at different powers using continuous wave (10-70 W) and pulsed (2-150 W) plasmas (13.56 MHz). In situ phase-modulated spectroscopic ellipsometer (UVISEL, Jobin-Yvon) operated in range 250-830 nm was used to determine the film thickness and optical properties like refractive index and extinction coefficient in a form of dispersion curves. For a selected wavelength of 633 nm, the refractive index increased from 1.7 to 2.3 and the extinction coefficient was ranging from 0 to 0.15 with enhanced power. The dielectric function of films evaluated by spectroscopic ellipsometry was fitted by Tauc-Lorentz formula to determine the band gap, which decreased from 2.7 eV (2 W) to 0.7 eV (150 W) with enhanced power. The optical properties of films dependent on the power were similar for continuous wave and pulsed plasmas. The deposition rate for continuous wave and pulsed plasmas varied from 82 to 262 nm/min as a function of power.

Klíčová slova

PECVD, Spectroscopic Ellipsometry, Refractive Index, Extinction Coefficient, Band gap

Autoři

BRÁNECKÝ, M.; ČECH, V.

Vydáno

23. 3. 2017

Nakladatel

Vysoké učení technické v Brně, Fakulta Chemická

Místo

Purkyňova 464/118, 61200 Brno

ISBN

978-80-214-5488-0

Kniha

Sborník abstraktů. Studentská konference CHEMIE JE ŽIVOT

Edice

1

Číslo edice

1

Strany od

79

Strany do

79

Strany počet

1

BibTex

@misc{BUT140147,
  author="Martin {Bránecký} and Vladimír {Čech}",
  title="Thin Films of Tetravinylsilane Characterized by Spectroscopic Ellipsometry",
  booktitle="Sborník abstraktů. Studentská konference CHEMIE JE ŽIVOT",
  year="2017",
  series="1",
  edition="1",
  pages="79--79",
  publisher="Vysoké učení technické v Brně, Fakulta Chemická",
  address="Purkyňova 464/118, 61200 Brno",
  isbn="978-80-214-5488-0",
  note="abstract"
}