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BRÁNECKÝ, M. ČECH, V.
Originální název
Thin Films of Tetravinylsilane Characterized by Spectroscopic Ellipsometry
Typ
abstrakt
Jazyk
angličtina
Originální abstrakt
We prepared thin films from vapor of tetravinylsilane (TVS) monomer using plasma-enhanced chemical vapor deposition (PECVD) with a process gas pressure of 2.7 Pa at a monomer flow rate of 3.8 sccm. Thin films were deposited at different powers using continuous wave (10-70 W) and pulsed (2-150 W) plasmas (13.56 MHz). In situ phase-modulated spectroscopic ellipsometer (UVISEL, Jobin-Yvon) operated in range 250-830 nm was used to determine the film thickness and optical properties like refractive index and extinction coefficient in a form of dispersion curves. For a selected wavelength of 633 nm, the refractive index increased from 1.7 to 2.3 and the extinction coefficient was ranging from 0 to 0.15 with enhanced power. The dielectric function of films evaluated by spectroscopic ellipsometry was fitted by Tauc-Lorentz formula to determine the band gap, which decreased from 2.7 eV (2 W) to 0.7 eV (150 W) with enhanced power. The optical properties of films dependent on the power were similar for continuous wave and pulsed plasmas. The deposition rate for continuous wave and pulsed plasmas varied from 82 to 262 nm/min as a function of power.
Klíčová slova
PECVD, Spectroscopic Ellipsometry, Refractive Index, Extinction Coefficient, Band gap
Autoři
BRÁNECKÝ, M.; ČECH, V.
Vydáno
23. 3. 2017
Nakladatel
Vysoké učení technické v Brně, Fakulta Chemická
Místo
Purkyňova 464/118, 61200 Brno
ISBN
978-80-214-5488-0
Kniha
Sborník abstraktů. Studentská konference CHEMIE JE ŽIVOT
Edice
1
Číslo edice
Strany od
79
Strany do
Strany počet
BibTex
@misc{BUT140147, author="Martin {Bránecký} and Vladimír {Čech}", title="Thin Films of Tetravinylsilane Characterized by Spectroscopic Ellipsometry", booktitle="Sborník abstraktů. Studentská konference CHEMIE JE ŽIVOT", year="2017", series="1", edition="1", pages="79--79", publisher="Vysoké učení technické v Brně, Fakulta Chemická", address="Purkyňova 464/118, 61200 Brno", isbn="978-80-214-5488-0", note="abstract" }