Detail publikace

Detection of Backscattered Electrons in Low Voltage Scanning Electron Microscope

WANDROL, P.

Originální název

Detection of Backscattered Electrons in Low Voltage Scanning Electron Microscope

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

This paper deals with detection of backacattered electrons in scanning electron microscope when the accelerating voltage is 5 kV and less. New detection system for low energy backscattered electrons is shown.

Klíčová slova

low voltage scanning electron microscopy, backscattered electrons, detection

Autoři

WANDROL, P.

Rok RIV

2004

Vydáno

29. 4. 2004

Nakladatel

Vysoké učení technické v Brně

Místo

Brno

ISBN

80-214-2636-5

Kniha

Proceedings of the 10th conference Student EEICT 2004.

Číslo edice

1

Strany od

693

Strany do

696

Strany počet

4

BibTex

@inproceedings{BUT14137,
  author="Petr {Wandrol}",
  title="Detection of Backscattered Electrons in Low Voltage Scanning Electron Microscope",
  booktitle="Proceedings of the 10th conference Student EEICT 2004.",
  year="2004",
  number="1",
  pages="4",
  publisher="Vysoké učení technické v Brně",
  address="Brno",
  isbn="80-214-2636-5"
}