Detail publikace

Low Energy Ion Scattering as a depth profiling tool for thin layers - Case of bromine Methanol etched CdTe

ŠIK, O. BÁBOR, P. POLČÁK, J. BELAS, E. MORAVEC, P. GRMELA, L. STANĚK, J.

Originální název

Low Energy Ion Scattering as a depth profiling tool for thin layers - Case of bromine Methanol etched CdTe

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

We have investigated the properties of the Te-rich surface layer formed after a bromine-methanol etch of CdTe single crystal by two methods: Angle Resolved X-Ray Photoelectron Spectroscopy (ARXPS) and Low Energy Ion Scattering (LEIS) in the Dynamic mode. We compare the acquisition time of each method. The results showed similar, exponential decay of the Te/Cd ratio to a depth of 6 nm. At the depths higher than 6 nm, the substrate becomes stoichiometric. Dynamic LEIS provided more detailed information about composition at depths lower than the probing depth of ARXPS. The Dynamic LEIS measurements suggest that the composition of the outermost layer of CdTe after bromine-methanol etching consists of CdTe4.

Klíčová slova

CdTe; Bromine methanol etching; Thin films; Depth profile; Stoichiometry; Surface analysis; ARXPS; Dynamic LEIS

Autoři

ŠIK, O.; BÁBOR, P.; POLČÁK, J.; BELAS, E.; MORAVEC, P.; GRMELA, L.; STANĚK, J.

Vydáno

13. 3. 2018

Nakladatel

PERGAMON-ELSEVIER SCIENCE LTD

Místo

THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, ENGLAND

ISSN

0042-207X

Periodikum

Vacuum

Číslo

152

Stát

Spojené království Velké Británie a Severního Irska

Strany od

138

Strany do

144

Strany počet

7

URL

https://www.sciencedirect.com/science/article/pii/S0042207X17314653

BibTex

@article{BUT146607,
  author="Ondřej {Šik} and Petr {Bábor} and Josef {Polčák} and Eduard {Belas} and Pavel {Moravec} and Lubomír {Grmela} and Jan {Staněk}",
  title="Low Energy Ion Scattering as a depth profiling tool for thin layers - Case of bromine Methanol etched CdTe",
  journal="Vacuum",
  year="2018",
  number="152",
  pages="138--144",
  doi="10.1016/j.vacuum.2018.03.014",
  issn="0042-207X",
  url="https://www.sciencedirect.com/science/article/pii/S0042207X17314653"
}