Detail publikace

Precise determination of thermal parameters of a microbolometer

SVATOŠ, V. GABLECH, I. PEKÁREK, J. KLEMPA, J. NEUŽIL, P.

Originální název

Precise determination of thermal parameters of a microbolometer

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Determination of microbolometer thermal properties such as thermal capacitance, conductance, time constant, and IR responsivity is of the utmost importance as they directly influence microbolometer performance. Here we show a technique to measure them by using a minimized self-heating effect, thus leading to their precise determination via measurements based on an AC-biased Wheatstone bridge containing a microbolometer. The bridge outputs were subtracted from each other by a differential voltage preamplifier with its output processed by a lock-in amplifier. The lock-in amplifier output as a function of the amplitude of AC bias provided an amplitude of microbolometer thermal conductivity. A microbolometer temperature response to pulse irradiation of its membrane provided the value of its thermal time constant and, thus, its thermal capacitance. Finally, we also extracted microbolometer responsivity using a blackbody IR source. The method was experimentally verified using a micromachined bolometer, which showed excellent agreement with the analytical solution.

Klíčová slova

Microbolometer; MEMS; Thermal parameters; Lock-in amplifier; IR response

Autoři

SVATOŠ, V.; GABLECH, I.; PEKÁREK, J.; KLEMPA, J.; NEUŽIL, P.

Vydáno

1. 9. 2018

ISSN

1350-4495

Periodikum

INFRARED PHYSICS & TECHNOLOGY

Ročník

93

Číslo

NA

Stát

Nizozemsko

Strany od

286

Strany do

290

Strany počet

5

URL

https://www.sciencedirect.com/science/article/pii/S1350449518303049

BibTex

@article{BUT149037,
  author="Vojtěch {Svatoš} and Imrich {Gablech} and Jan {Pekárek} and Jaroslav {Klempa} and Pavel {Neužil}",
  title="Precise determination of thermal parameters of a microbolometer",
  journal="INFRARED PHYSICS & TECHNOLOGY",
  year="2018",
  volume="93",
  number="NA",
  pages="286--290",
  doi="10.1016/j.infrared.2018.07.037",
  issn="1350-4495",
  url="https://www.sciencedirect.com/science/article/pii/S1350449518303049"
}