Detail publikace

Highly hydrogen sensitive micromachined sensors based on aerosol-assisted chemical vapor deposited ZnO rods

VALLEJOS VARGAS, S. GRÁCIA, I. LEDNICKÝ, T. VOJKŮVKA, L. FIGUERAS, E. HUBÁLEK, J. CANÉ, C.

Originální název

Highly hydrogen sensitive micromachined sensors based on aerosol-assisted chemical vapor deposited ZnO rods

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Chemoresistive gas microsensors with highly hydrogen sensitive zinc oxide rods dominated by exposed {100} surfaces are fabricated. The hexagonal rod structures are integrated into micromachined transducing platforms without the need for substrate pre-treatment, via a vapor-solid mechanism enabled using an aerosol-assisted chemical vapor deposition method. The improved functionality of these systems towards hydrogen is attributed to the formation of an accumulation layer at the zinc oxide rods after hydrogen exposure, which includes a mechanism not only dominated by the oxygen vacancies, but also by the formation of intermediate energy levels for the transfer of charge from hydrogen to the zinc oxide conduction band.

Klíčová slova

Zinc oxide; Gas sensor; Hydrogen

Autoři

VALLEJOS VARGAS, S.; GRÁCIA, I.; LEDNICKÝ, T.; VOJKŮVKA, L.; FIGUERAS, E.; HUBÁLEK, J.; CANÉ, C.

Vydáno

1. 9. 2018

Nakladatel

ELSEVIER SCIENCE SA,

Místo

LAUSANNE, SWITZERLAND

ISSN

0925-4005

Periodikum

Sensors and Actuators B: Chemical

Ročník

268

Číslo

1

Stát

Švýcarská konfederace

Strany od

15

Strany do

21

Strany počet

7

URL

https://www.sciencedirect.com/science/article/pii/S0925400518307299?via%3Dihub

BibTex

@article{BUT155578,
  author="VALLEJOS VARGAS, S. and GRÁCIA, I. and LEDNICKÝ, T. and VOJKŮVKA, L. and FIGUERAS, E. and HUBÁLEK, J. and CANÉ, C.",
  title="Highly hydrogen sensitive micromachined sensors based on aerosol-assisted chemical vapor deposited ZnO rods",
  journal="Sensors and Actuators B: Chemical",
  year="2018",
  volume="268",
  number="1",
  pages="15--21",
  doi="10.1016/j.snb.2018.04.033",
  issn="0925-4005",
  url="https://www.sciencedirect.com/science/article/pii/S0925400518307299?via%3Dihub"
}