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MOZALEV, A. BENDOVÁ, M. PYTLÍČEK, Z. LLOBET, E.
Originální název
The formation-properties of porous-alumina-embedded hafnium-oxide nanorod arrays
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
Hafnium-oxide film with the self-organized nanostructured 3-dimentional architecture is synthesized via the anodizing of thin Al-Hf layers in a phosphoric acid electrolyte. The process involves the growth of a porous alumina film, followed by pore-assisted oxidation of the Hf underlayer. The film consists of HfOx nanorods anchored to continuous hafnium-oxide bottom layer that forms under the pores. Post-anodizing treatments include annealing at 600C in air or vacuum. From the EIS measurements and Mott-Schottky analysis of the as anodized and air-annealed films, the bottom oxide behaves as a good dielectric whereas the nanorods exhibit semiconducting properties. The annealing in vacuum makes the film fully semiconducting, with a unique gradient in film crystal structure, composition, and properties across the film thickness. Potential applications are as dielectrics for electrolytic or on-chip capacitors, and as active layers for gas microsensors
Klíčová slova
anodizing, porous anodic alumina, hafnium oxide, nanostructure, dielectric, semiconductor, capacitor
Autoři
MOZALEV, A.; BENDOVÁ, M.; PYTLÍČEK, Z.; LLOBET, E.
Vydáno
24. 6. 2019
Nakladatel
University of Zilina in EDIS - Publishing Centre of UZ
Místo
Zilina, Slobak republic
ISBN
978-80-554-1568-0
Kniha
Proceedings of 7th International Conference on ADVANCES IN ELECTRONIC AND PHOTONIC TECHNOLOGIES
Edice
D. Jandura, Ľ. Šušlik, P. Urbancová, J. Kováč
Číslo edice
1
Strany od
19
Strany do
22
Strany počet
4
BibTex
@inproceedings{BUT161249, author="Alexander {Mozalev} and Mária {Bendová} and Zdeněk {Pytlíček} and Eduard {Llobet}", title="The formation-properties of porous-alumina-embedded hafnium-oxide nanorod arrays", booktitle="Proceedings of 7th International Conference on ADVANCES IN ELECTRONIC AND PHOTONIC TECHNOLOGIES", year="2019", series="D. Jandura, Ľ. Šušlik, P. Urbancová, J. Kováč", number="1", pages="19--22", publisher="University of Zilina in EDIS - Publishing Centre of UZ", address="Zilina, Slobak republic", isbn="978-80-554-1568-0" }