Detail publikace

The formation-properties of porous-alumina-embedded hafnium-oxide nanorod arrays

MOZALEV, A. BENDOVÁ, M. PYTLÍČEK, Z. LLOBET, E.

Originální název

The formation-properties of porous-alumina-embedded hafnium-oxide nanorod arrays

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Hafnium-oxide film with the self-organized nanostructured 3-dimentional architecture is synthesized via the anodizing of thin Al-Hf layers in a phosphoric acid electrolyte. The process involves the growth of a porous alumina film, followed by pore-assisted oxidation of the Hf underlayer. The film consists of HfOx nanorods anchored to continuous hafnium-oxide bottom layer that forms under the pores. Post-anodizing treatments include annealing at 600C in air or vacuum. From the EIS measurements and Mott-Schottky analysis of the as anodized and air-annealed films, the bottom oxide behaves as a good dielectric whereas the nanorods exhibit semiconducting properties. The annealing in vacuum makes the film fully semiconducting, with a unique gradient in film crystal structure, composition, and properties across the film thickness. Potential applications are as dielectrics for electrolytic or on-chip capacitors, and as active layers for gas microsensors

Klíčová slova

anodizing, porous anodic alumina, hafnium oxide, nanostructure, dielectric, semiconductor, capacitor

Autoři

MOZALEV, A.; BENDOVÁ, M.; PYTLÍČEK, Z.; LLOBET, E.

Vydáno

24. 6. 2019

Nakladatel

University of Zilina in EDIS - Publishing Centre of UZ

Místo

Zilina, Slobak republic

ISBN

978-80-554-1568-0

Kniha

Proceedings of 7th International Conference on ADVANCES IN ELECTRONIC AND PHOTONIC TECHNOLOGIES

Edice

D. Jandura, Ľ. Šušlik, P. Urbancová, J. Kováč

Číslo edice

1

Strany od

19

Strany do

22

Strany počet

4

BibTex

@inproceedings{BUT161249,
  author="Alexander {Mozalev} and Mária {Bendová} and Zdeněk {Pytlíček} and Eduard {Llobet}",
  title="The formation-properties of porous-alumina-embedded hafnium-oxide nanorod arrays",
  booktitle="Proceedings of 7th International Conference on ADVANCES IN ELECTRONIC AND PHOTONIC TECHNOLOGIES",
  year="2019",
  series="D. Jandura, Ľ. Šušlik, P. Urbancová, J. Kováč",
  number="1",
  pages="19--22",
  publisher="University of Zilina in EDIS - Publishing Centre of UZ",
  address="Zilina, Slobak republic",
  isbn="978-80-554-1568-0"
}