Detail publikace

Characterization of a-CSi:H films prepared by PECVD in terms of adhesion

PLICHTA, T. BRÁNECKÝ, M. ČECH, V.

Originální název

Characterization of a-CSi:H films prepared by PECVD in terms of adhesion

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Mechanical properties of thin films and, in particular, adhesion are crucial engineering parameters which must be determined to allow their successful application both in the industry and science. Deposited hydrogenated amorphous carbon-silicon (a-CSi:H) films prepared by plasma-enhanced chemical vapour deposition (PECVD) were tested using a nanoscratch test. The load at which adhesion failure occurs is known as the critical normal load and is used as a semi-quantitative measure of adhesion. However, results in this article suggest that the critical normal load is not an appropriate measure of adhesion for these materials, and instead, the work of adhesion should rather be considered as an alternative method. This is due to the considerable variation of Young's modulus, which affects the critical load figures, while the friction coefficient and film thickness also do not have negligible influence. Moreover, the critical load is considerably influenced by intrinsic and extrinsic parameters. Furthermore, it has been found that the critical load increased with increasing a-CSi:H film thickness, but this did not apply to the work of adhesion. On the contrary, it remained constant unless a change of film failure mode occurred. Adhesion was monitored for 5 years to determine the effect of aging and the results were found to be practically identical over this duration which indicates high film stability.

Klíčová slova

Plasma-enhanced chemical vapour deposition (PECVD); a-CSi:H; Thin films; Adhesion; Nanoscratch test; Work of adhesion

Autoři

PLICHTA, T.; BRÁNECKÝ, M.; ČECH, V.

Vydáno

15. 3. 2020

Nakladatel

ELSEVIER SCIENCE SA

Místo

PO BOX 564, 1001 LAUSANNE, SWITZERLAND

ISSN

0257-8972

Periodikum

Surface and Coatings Technology

Ročník

385

Číslo

1

Stát

Švýcarská konfederace

Strany od

1

Strany do

9

Strany počet

9

URL

https://www.sciencedirect.com/science/article/pii/S025789722030044X

BibTex

@article{BUT161355,
  author="Tomáš {Plichta} and Martin {Bránecký} and Vladimír {Čech}",
  title="Characterization of a-CSi:H films prepared by PECVD in terms of adhesion",
  journal="Surface and Coatings Technology",
  year="2020",
  volume="385",
  number="1",
  pages="1--9",
  doi="10.1016/j.surfcoat.2020.125375",
  issn="0257-8972",
  url="https://www.sciencedirect.com/science/article/pii/S025789722030044X"
}