Detail publikace

Stereometric analysis of Ta2O5 thin films

SOBOLA, D. KASPAR, P. OULEHLA, J. ŢĂLU, Ş. PAPEŽ, N.

Originální název

Stereometric analysis of Ta2O5 thin films

Typ

článek v časopise ve Scopus, Jsc

Jazyk

angličtina

Originální abstrakt

The purpose of this work is the study of the correlation between the thickness of tantalum pentoxide thin films and their three-dimensional (3D) micromorphology.The samples were prepared on silicon substrates by electron beam evaporation. The differences in surface structure of the processed and references samples were investigated. Compositional studies were performed by energy-dispersiveX-rayspectroscopy. Stereometric analysis was carried out on the basis of atomic force microscopy(AFM) data, for antalum pentoxide samples with 20nm, 40nm,60nm, 80nm and 100nm thicknesses. These methods are frequently used in describing experimental data of surface nanomorphology of Ta2O5. The results can be used to validate theoretical models for prediction or correlation of nanotexture surface parameters.

Klíčová slova

atomic force microscopy; stereometric analysis; Ta2O5, topograph

Autoři

SOBOLA, D.; KASPAR, P.; OULEHLA, J.; ŢĂLU, Ş.; PAPEŽ, N.

Vydáno

27. 1. 2020

Nakladatel

De Gruyter

ISSN

2083-134X

Periodikum

MATERIALS SCIENCE-POLAND

Ročník

1

Číslo

1

Stát

Polská republika

Strany od

1

Strany do

10

Strany počet

10

URL

https://content.sciendo.com/view/journals/msp/ahead-of-print/article-10.2478-msp-2019-0083.xml

Plný text v Digitální knihovně

http://hdl.handle.net/11012/193376

BibTex

@article{BUT161606,
  author="Dinara {Sobola} and Pavel {Kaspar} and Jindřich {Oulehla} and Ştefan {Ţălu} and Nikola {Papež}",
  title="Stereometric analysis of Ta2O5 thin films",
  journal="MATERIALS SCIENCE-POLAND",
  year="2020",
  volume="1",
  number="1",
  pages="1--10",
  doi="10.2478/msp-2019-0083",
  issn="2083-134X",
  url="https://content.sciendo.com/view/journals/msp/ahead-of-print/article-10.2478-msp-2019-0083.xml"
}