Detail publikace

Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry

VOHÁNKA, J. ŠUSTEK, Š. BURŠÍKOVÁ, V. ŠKLÍBOVÁ, V. ŠULC, V. HOMOLA, V. FRANTA, D. ČERMÁK, M. OHLÍDAL, M. OHLÍDAL, I.

Originální název

Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

The effects of thickness non-uniformity on measured optical quantities must be often considered in the optical characterization. The effects of thickness non-uniformity can be taken into account by averaging the Mueller matrices over the distribution of local thicknesses within the measured area. The distribution of local thicknesses can be assumed in a certain form (e.g. the uniform distribution), or it can be derived on the basis of a model assuming a certain shape of thickness non-uniformity. The latter approach is especially useful for the variable-angle spectroscopic ellipsometry since it can take into account dependence on the incidence angle due to the changes in the size of the light spot. This paper presents results of the optical characterization of three polymer-like thin films highly non-uniform in thickness using variable-angle spectroscopic ellipsometry. The shapes of the thickness non-uniform films are determined on the basis of a model assuming local thicknesses given by quadratic polynomials in coordinates along the surfaces of the films. The studied areas on the films were also measured by the imaging spectroscopic reflectometry, which provides a more direct method to determine local thicknesses. The results achieved using the imaging spectroscopic reflectometry and variable-angle spectroscopic ellipsometry were then compared.

Klíčová slova

Thickness non-uniformity; Ellipsometry; Imaging spectroscopic reflectometry

Autoři

VOHÁNKA, J.; ŠUSTEK, Š.; BURŠÍKOVÁ, V.; ŠKLÍBOVÁ, V.; ŠULC, V.; HOMOLA, V.; FRANTA, D.; ČERMÁK, M.; OHLÍDAL, M.; OHLÍDAL, I.

Vydáno

30. 12. 2020

Nakladatel

ELSEVIER

Místo

AMSTERDAM

ISSN

1873-5584

Periodikum

APPLIED SURFACE SCIENCE

Ročník

534

Číslo

147625

Stát

Nizozemsko

Strany od

1

Strany do

10

Strany počet

10

URL

https://www.sciencedirect.com/science/article/pii/S0169433220323825?via%3Dihub

BibTex

@article{BUT167469,
  author="Jíří {Vohánka} and Štěpán {Šustek} and Vilma {Buršíková} and Veronika {Šklíbová} and Václav {Šulc} and Vojtěch {Homola} and Daniel {Franta} and Martin {Čermák} and Miloslav {Ohlídal} and Ivan {Ohlídal}",
  title="Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry",
  journal="APPLIED SURFACE SCIENCE",
  year="2020",
  volume="534",
  number="147625",
  pages="1--10",
  doi="10.1016/j.apsusc.2020.147625",
  issn="1873-5584",
  url="https://www.sciencedirect.com/science/article/pii/S0169433220323825?via%3Dihub"
}