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Detail publikace
Balram, KC. Westly, DA. Davanco, M. Grutter, KE. Li, Q. Michels, T. Ray, CH. Yu, L. Kasica, RJ. Wallin, CB. Gilbert, IJ. Bryce, BA. Simelgor, G. Topolancik, J. Lobontiu, N. Liu, Y. Neuzil, P. Svatos, V. Dill, KA. Bertrand, NA. Metzler, M. Lopez, G. Czaplewski, DA. Ocola, L. Srinivasan, KA. Stavis, S. Aksyuk, VA. Liddle, JA. Krylov, S. Ilic, BR.
Originální název
Nanolithography Toolbox: Device design at the nanoscale
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
We have developed a platform-independent software package for designing nanometer scaled device architectures. The Nanolithography Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.
Klíčová slova
LITHOGRAPHY; RESOLUTION; PLATFORM
Autoři
Balram, KC.; Westly, DA.; Davanco, M.; Grutter, KE.; Li, Q.; Michels, T.; Ray, CH.; Yu, L.; Kasica, RJ.; Wallin, CB.; Gilbert, IJ.; Bryce, BA.; Simelgor, G.; Topolancik, J.; Lobontiu, N.; Liu, Y.; Neuzil, P.; Svatos, V.; Dill, KA.; Bertrand, NA.; Metzler, M.; Lopez, G.; Czaplewski, DA.; Ocola, L.; Srinivasan, KA.; Stavis, S.; Aksyuk, VA.; Liddle, JA.; Krylov, S.; Ilic, BR.
Vydáno
14. 5. 2017
ISBN
978-1-9435-8027-9
Kniha
2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)
Strany od
1
Strany do
2
Strany počet
BibTex
@inproceedings{BUT170237, author="Balram, KC. and Westly, DA. and Davanco, M. and Grutter, KE. and Li, Q. and Michels, T. and Ray, CH. and Yu, L. and Kasica, RJ. and Wallin, CB. and Gilbert, IJ. and Bryce, BA. and Simelgor, G. and Topolancik, J. and Lobontiu, N. and Liu, Y. and Neuzil, P. and Svatos, V. and Dill, KA. and Bertrand, NA. and Metzler, M. and Lopez, G. and Czaplewski, DA. and Ocola, L. and Srinivasan, KA. and Stavis, S. and Aksyuk, VA. and Liddle, JA. and Krylov, S. and Ilic, BR.", title="Nanolithography Toolbox: Device design at the nanoscale", booktitle="2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)", year="2017", pages="1--2", isbn="978-1-9435-8027-9" }