Detail publikace

Nanolithography Toolbox: Device design at the nanoscale

Balram, KC. Westly, DA. Davanco, M. Grutter, KE. Li, Q. Michels, T. Ray, CH. Yu, L. Kasica, RJ. Wallin, CB. Gilbert, IJ. Bryce, BA. Simelgor, G. Topolancik, J. Lobontiu, N. Liu, Y. Neuzil, P. Svatos, V. Dill, KA. Bertrand, NA. Metzler, M. Lopez, G. Czaplewski, DA. Ocola, L. Srinivasan, KA. Stavis, S. Aksyuk, VA. Liddle, JA. Krylov, S. Ilic, BR.

Originální název

Nanolithography Toolbox: Device design at the nanoscale

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

We have developed a platform-independent software package for designing nanometer scaled device architectures. The Nanolithography Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

Klíčová slova

LITHOGRAPHY; RESOLUTION; PLATFORM

Autoři

Balram, KC.; Westly, DA.; Davanco, M.; Grutter, KE.; Li, Q.; Michels, T.; Ray, CH.; Yu, L.; Kasica, RJ.; Wallin, CB.; Gilbert, IJ.; Bryce, BA.; Simelgor, G.; Topolancik, J.; Lobontiu, N.; Liu, Y.; Neuzil, P.; Svatos, V.; Dill, KA.; Bertrand, NA.; Metzler, M.; Lopez, G.; Czaplewski, DA.; Ocola, L.; Srinivasan, KA.; Stavis, S.; Aksyuk, VA.; Liddle, JA.; Krylov, S.; Ilic, BR.

Vydáno

14. 5. 2017

ISBN

978-1-9435-8027-9

Kniha

2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)

Strany od

1

Strany do

2

Strany počet

2

BibTex

@inproceedings{BUT170237,
  author="Balram, KC. and Westly, DA. and Davanco, M. and Grutter, KE. and Li, Q. and Michels, T. and Ray, CH. and Yu, L. and Kasica, RJ. and Wallin, CB. and Gilbert, IJ. and Bryce, BA. and Simelgor, G. and Topolancik, J. and Lobontiu, N. and Liu, Y. and Neuzil, P. and Svatos, V. and Dill, KA. and Bertrand, NA. and Metzler, M. and Lopez, G. and Czaplewski, DA. and Ocola, L. and Srinivasan, KA. and Stavis, S. and Aksyuk, VA. and Liddle, JA. and Krylov, S. and Ilic, BR.",
  title="Nanolithography Toolbox: Device design at the nanoscale",
  booktitle="2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)",
  year="2017",
  pages="1--2",
  isbn="978-1-9435-8027-9"
}