Detail publikace

Characterization of AlN nanolayers deposited on a surface of HOPG by PE-ALD

DALLAEV, R.

Originální název

Characterization of AlN nanolayers deposited on a surface of HOPG by PE-ALD

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

In this study plasma-enhanced atomic layer deposition process of AlN has been performed with the purpose to test the expediency of highly oriented pyrolytic graphite (HOPG) to serve as a substrate in such process. The obtained samples were thoroughly analyzed using various analytical techniques. Atomic force microscopy was employed for studying topographic and morphological features of the surface; x-ray photoelectron spectroscopy (XPS) analysis supported by second ion-mass spectrometry method (SIMS) has been conducted on the obtained sample to investigate the chemical nature of the deposited films as well as elemental distribution. Temperature stability of HOPG makes it a suitable substrate for preparation of AlN films, being a bottom contact for further testing of the films electrical properties. The data gathered from the aforementioned techniques have indicated that HOPG is a viable choice for AlN ALD process.

Klíčová slova

aluminium nitride, atomic layer deposition, highly oriented pyrolytic graphite, x-ray photoelectron spectroscopy, atomic force microscopy, second ion-mass spectrometry.

Autoři

DALLAEV, R.

Vydáno

10. 6. 2021

Nakladatel

Brno University of Technology, Faculty of Electrical Engineering and Communication

Místo

Brno

ISBN

978-80-214-5943-4

Kniha

Proceedings of the 27th Conference STUDENT EEICT 2021 selected papers

Edice

1

Strany od

193

Strany do

198

Strany počet

6

URL

https://www.eeict.cz/eeict_download/archiv/sborniky/EEICT_2021_sbornik_2_v3_DOI.pdf

BibTex

@inproceedings{BUT171782,
  author="Rashid {Dallaev}",
  title="Characterization of AlN nanolayers deposited on a surface of HOPG by PE-ALD",
  booktitle="Proceedings of the 27th Conference STUDENT EEICT 2021 selected papers",
  year="2021",
  series="1",
  pages="193--198",
  publisher="Brno University of Technology, Faculty of Electrical Engineering and Communication",
  address="Brno",
  doi="10.13164/eeict.2021.193",
  isbn="978-80-214-5943-4",
  url="https://www.eeict.cz/eeict_download/archiv/sborniky/EEICT_2021_sbornik_2_v3_DOI.pdf"
}