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NI, S. BU, Y. ZHU, H. NEUŽIL, P. YOBAS, L.
Originální název
A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles
Typ
článek v časopise ve Web of Science, Jimp
Jazyk
angličtina
Originální abstrakt
Here, we introduce a microchip for differential measurements of aqueous samples in twin calorimetric arms with a sub-nL enclosed space. Each arm features a fluidic microchannel located in close proximity to a thin-film resistance thermometer and heater patterned on a low-stress SiN membrane held over a Si cavity with suspension beams. The chip exhibits a rapid response with a thermal time constant of less than 10 ms in atmosphere and a residual thermal conductance below 6 mu W.K-1, one of the lowest reported and accounts for the excellent sensitivity registered in vacuum up to 11 V.W-1. These values are in good agreement with those ones predicted by modeling using finite element method, lumped-capacitance analysis, and calorimeter electrothermal circuit simulation together with the measurement system. Long suspension beams in each arm ensure uniform temperature maintained across its membrane as revealed by the fluorescence-based melting curve analysis. We share the specific heat capacity values of water, glycerin, and mineral oil accurately measured by the chip. Lastly, we demonstrate the chip calorimeter utility on the measurement of the photothermal transduction efficiency of plasmonic nanoparticles, which makes our study further unique in expanding the applications of chip calorimeters.
Klíčová slova
Calorimetry; microelectromechanical systems; microfabrication; nanoparticles; photothermal effects; plasmonic
Autoři
NI, S.; BU, Y.; ZHU, H.; NEUŽIL, P.; YOBAS, L.
Vydáno
1. 10. 2021
Nakladatel
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Místo
PISCATAWAY
ISSN
1057-7157
Periodikum
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Ročník
30
Číslo
5
Stát
Spojené státy americké
Strany od
759
Strany do
769
Strany počet
11
URL
https://ieeexplore.ieee.org/document/9494100
BibTex
@article{BUT172855, author="NI, S. and BU, Y. and ZHU, H. and NEUŽIL, P. and YOBAS, L.", title="A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles", journal="JOURNAL OF MICROELECTROMECHANICAL SYSTEMS", year="2021", volume="30", number="5", pages="759--769", doi="10.1109/JMEMS.2021.3096524", issn="1057-7157", url="https://ieeexplore.ieee.org/document/9494100" }