Detail publikace

The Growth, Composition, and Functional Properties of Self-Organized Nanostructured ZrO2-Al2O3 Anodic Films for Advanced Dielectric Applications

KAMNEV, K. SEPÚLVEDA SEPÚLVEDA, L. BENDOVÁ, M. PYTLÍČEK, Z. PRÁŠEK, J. KOLÍBALOVÁ, E. MICHALIČKA, J. MOZALEV, A.

Originální název

The Growth, Composition, and Functional Properties of Self-Organized Nanostructured ZrO2-Al2O3 Anodic Films for Advanced Dielectric Applications

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

An aluminum-on-zirconium bilayer is anodized in oxalic acid solution to transform the Al layer into porous anodic alumina (PAA); this is followed by the PAA-assisted re-anodizing of the Zr underlayer at voltages 40-280 V. The process results in an array of amorphous ZrO2 nanocolumns, 45-330 nm long, partly filling the PAA pores and anchored to a continuous bottom oxide layer under the pores, 20-130 nm thick, comprising a ZrO1.8 spongelike sublayer superimposed on a ZrO1.5 compact sublayer. The thicknesses of the nanostructured and bottom oxides increase linearly with re-anodizing voltage, disclosing a low film formation ratio of 1.65 nm V-1, which is impossible with anodic ZrO2. The amorphous ZrO2 nanocolumns embedded in the highly resistive amorphous PAA matrix combined with the laminated bottom oxide reveal a nearly ideal dielectric performance in a wide frequency range (10(-4)-10(4) Hz) complemented by the low leakage currents and high breakdown voltages (up to 280 V). The film permittivity may be tuned, from 11 to 20, by combining the anodizing and pore-widening techniques. The advantageous architecture, fabrication approach, and functional properties of the films allow the design of a prototype of an emerging hybrid polymer electrolytic microcapacitor for on-chip integration.

Klíčová slova

anodizing; capacitor; dielectric properties; porous anodic alumina; ZrO;

Autoři

KAMNEV, K.; SEPÚLVEDA SEPÚLVEDA, L.; BENDOVÁ, M.; PYTLÍČEK, Z.; PRÁŠEK, J.; KOLÍBALOVÁ, E.; MICHALIČKA, J.; MOZALEV, A.

Vydáno

8. 9. 2021

Nakladatel

WILEY

Místo

HOBOKEN

ISSN

2052-1537

Periodikum

MATERIALS CHEMISTRY FRONTIERS

Ročník

7

Číslo

2100505

Stát

Spojené království Velké Británie a Severního Irska

Strany od

1

Strany do

13

Strany počet

13

URL

https://onlinelibrary.wiley.com/doi/10.1002/aelm.202100505

BibTex

@article{BUT173305,
  author="Kirill {Kamnev} and Lina Marcela {Sepúlveda Sepúlveda} and Mária {Bendová} and Zdeněk {Pytlíček} and Jan {Prášek} and Eva {Kolíbalová} and Jan {Michalička} and Alexander {Mozalev}",
  title="The Growth, Composition, and Functional Properties of Self-Organized Nanostructured ZrO2-Al2O3 Anodic Films for Advanced Dielectric Applications",
  journal="MATERIALS CHEMISTRY FRONTIERS",
  year="2021",
  volume="7",
  number="2100505",
  pages="1--13",
  doi="10.1002/aelm.202100505",
  issn="2052-1537",
  url="https://onlinelibrary.wiley.com/doi/10.1002/aelm.202100505"
}