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FOHLEROVÁ, Z. FECKO, P. GABLECH, I. KOŠELOVÁ, Z.
Originální název
High aspect ratio Parylene C micropillars formed by molding and ION-BEAM etching method
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
This paper represents the molding and plasma etching method for developing a high aspect ratio parylene C pillar array. The silicon mold was fabricated using the modified Bosch process. The parylene was deposited by chemical vapor deposition into the silicone holes, followed by the etching of silicon to obtain the transparent membrane of hollow parylene C pillars. The etching method was initialized by transferring the pattern on the hard titanium mask via standard photolithography, followed by titanium etching. The oxygen plasma ion-milling of parylene C produced the flexible pillars standing on the silicon substrate. Both pillar arrays were characterized by scanning electron microscopy. Arrays of micropillars could be applicable for measuring cellular forces or as the bioinspired platform with modulated surface chemistry.
Klíčová slova
Etching; Micropillars; Molding; Parylene C
Autoři
FOHLEROVÁ, Z.; FECKO, P.; GABLECH, I.; KOŠELOVÁ, Z.
Vydáno
21. 3. 2022
Nakladatel
TANGER
ISBN
9788088365006
Kniha
NANOCON Conference Proceedings - International Conference on Nanomaterials
Strany od
1
Strany do
4
Strany počet
URL
https://www.confer.cz/nanocon/2021/4349-high-aspect-ratio-parylene-c-micropillars-for-cellular-force-measurement
Plný text v Digitální knihovně
http://hdl.handle.net/11012/208223
BibTex
@inproceedings{BUT178619, author="Zdenka {Fohlerová} and Peter {Fecko} and Imrich {Gablech} and Zuzana {Košelová}", title="High aspect ratio Parylene C micropillars formed by molding and ION-BEAM etching method", booktitle="NANOCON Conference Proceedings - International Conference on Nanomaterials", year="2022", pages="1--4", publisher="TANGER", doi="10.37904/nanocon.2021.4349", isbn="9788088365006", url="https://www.confer.cz/nanocon/2021/4349-high-aspect-ratio-parylene-c-micropillars-for-cellular-force-measurement" }