Detail publikace

Optical characterization of inhomogeneous thin films with randomly rough boundaries

VOHÁNKA, J. OHLÍDAL, I. BURŠÍKOVÁ, V. KLAPETEK, P. KAUR, N.

Originální název

Optical characterization of inhomogeneous thin films with randomly rough boundaries

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

An inhomogeneous polymer-like thin film was deposited by the plasma enhanced chemical vapor deposition onto silicon single-crystal substrate whose surface was roughened by anodic oxidation. The inhomogeneous thin film with randomly rough boundaries was created as a result. This sample was studied using the variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. The structural model including the inhomogeneous thin film, transition layer, and identically rough boundaries was used to process the experimental data. The scalar diffraction theory was used to describe the influence of roughness. The influence of the scattered light registered by the spectrophotometer due to its finite acceptance angle was also taken into account. The thicknesses and optical constants of the inhomogeneous thin film and the transition layer were determined in the optical characterization together with the roughness parameters. The determined rms value of the heights of roughness was found to be in good agreement with values obtained using AFM. The results of the optical characterization of the studied inhomogeneous thin film with rough boundaries were also verified by comparing them with the results of the optical characterization of the inhomogeneous thin film prepared using the same deposition conditions but onto the substrate with a smooth surface. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

Klíčová slova

REFRACTIVE-INDEX; SPECTROSCOPIC ELLIPSOMETRY; SURFACE-ROUGHNESS; THICKNESS NONUNIFORMITY; STATISTICAL PROPERTIES; HEIGHT DISTRIBUTION; SILICON; REFLECTION; CONSTANTS; SYSTEM

Autoři

VOHÁNKA, J.; OHLÍDAL, I.; BURŠÍKOVÁ, V.; KLAPETEK, P.; KAUR, N.

Vydáno

17. 1. 2022

Nakladatel

Optica Publishing Group

Místo

WASHINGTON

ISSN

1094-4087

Periodikum

OPTICS EXPRESS

Ročník

30

Číslo

2

Stát

Spojené státy americké

Strany od

2033

Strany do

2047

Strany počet

15

URL

https://opg.optica.org/oe/fulltext.cfm?uri=oe-30-2-2033&id=467886

Plný text v Digitální knihovně

http://hdl.handle.net/11012/208222

BibTex

@article{BUT178666,
  author="Jíří {Vohánka} and Ivan {Ohlídal} and Vilma {Buršíková} and Petr {Klapetek} and Nupinder Jeet {Kaur}",
  title="Optical characterization of inhomogeneous thin films with randomly rough boundaries",
  journal="OPTICS EXPRESS",
  year="2022",
  volume="30",
  number="2",
  pages="2033--2047",
  doi="10.1364/OE.447146",
  issn="1094-4087",
  url="https://opg.optica.org/oe/fulltext.cfm?uri=oe-30-2-2033&id=467886"
}