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NEŠPOR, D. HAVLÍČEK, L. JUŘÍK, K.
Originální název
Numerical Analysis of ECR Plasma Source
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
Gases ionizers usage ECR (Electron Cyclotron Resonance) is one of the methods for creating two temperature plasma. Thanks to high efficiency is this method suitable for wide spectrum of applications. Especially for the systems which are sensitives on high power electrical noise, cooling is problematic for them or they have limited power supplier (electron microscopy, plasma actuators, etc.). The main disadvantage of ECR plasma sources is complicated design compared to the other ionisation techniques. The crucial is tune of the magnetostatics and high frequency fields in active area of the source. Working frequency also plays an important role and even electric and magnetic field ratio. This paper describes how to calculate electric and magnetic fields inside ECR plasma sources and how to enable tune and optimization of these sources. Paper also shows how to make visualisation of the active ECR surfaces and thereby deepening the understanding of how the sources works.
Klíčová slova
ECR, plasma source
Autoři
NEŠPOR, D.; HAVLÍČEK, L.; JUŘÍK, K.
Vydáno
1. 12. 2021
Nakladatel
IEEE
Místo
NEW YORK
ISBN
978-1-7281-7247-7
Kniha
2021 Photonics & Electromagnetics Research Symposium (PIERS)
ISSN
1559-9450
Periodikum
Progress In Electromagnetics
Stát
Spojené státy americké
Strany od
419
Strany do
422
Strany počet
4
URL
https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9694836
BibTex
@inproceedings{BUT179937, author="Dušan {Nešpor} and Lukáš {Havlíček} and Karel {Juřík}", title="Numerical Analysis of ECR Plasma Source", booktitle="2021 Photonics & Electromagnetics Research Symposium (PIERS)", year="2021", journal="Progress In Electromagnetics", pages="419--422", publisher="IEEE", address="NEW YORK", doi="10.1109/PIERS53385.2021.9694836", isbn="978-1-7281-7247-7", issn="1559-9450", url="https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9694836" }