Detail publikace

Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems

PAN, S., CHEN, K. VĚCHET, S.

Originální název

Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Fast positioning and vibration suppression play important roles in virtually all tasks requiring high speed maneuvers with sufficient motion accuracy

Klíčová slova

active stage; rubber bearing; flexible structure; vibration suppression; image inspection

Autoři

PAN, S., CHEN, K.; VĚCHET, S.

Vydáno

7. 12. 2022

Místo

Pilsen

ISBN

978-1-6654-1040-3

Kniha

2022 20th International Conference on Mechatronics - Mechatronika (ME)

Strany od

1

Strany do

6

Strany počet

6

URL

https://ieeexplore.ieee.org/document/9982985

BibTex

@inproceedings{BUT182474,
  author="PAN, S., CHEN, K. and VĚCHET, S.",
  title="Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems",
  booktitle="2022 20th International Conference on Mechatronics - Mechatronika (ME)",
  year="2022",
  pages="1--6",
  address="Pilsen",
  doi="10.1109/ME54704.2022.9982985",
  isbn="978-1-6654-1040-3",
  url="https://ieeexplore.ieee.org/document/9982985"
}