Detail publikace

ChemFET gas nanosensor arrays with alignment windows for assembly of single nanowires

CHMELA, O. GABLECH, I. SADÍLEK, J. BRODSKÝ, J. VALLEJOS VARGAS, S.

Originální název

ChemFET gas nanosensor arrays with alignment windows for assembly of single nanowires

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

This work focuses on the fabrication and characterization of ChemFET (Chemical Field-Effect Transistor) gas nanosensor arrays based on single nanowire (SNW). The fabrication processes include micro and nanofabrication techniques enabled by a combination of ultraviolet (UV) and e-beam lithography to build the ChemFET structure. Results show the integration and connection of SNWs across the multiple pairs of nanoelectrodes in the ChemFET by dielectrophoresis process (DEP) thanks to the incorporation of alignment windows (200-300 nm) adapted to the diameter of the NWs. Measurements of the SNW ChemFET array's output and transfer characteristics prove the influence of gate bias on the drain current regulation. Tests upon hydrogen (H-2) and nitrogen dioxide (NO2) as analyte models of reducing and oxidizing gases show the ChemFET sensing functionality. Moreover, results demonstrate better response characteristics to H-2 when the ChemFET operates in the subthreshold regime. The design concepts and methods proposed for fabricating the SNW-based ChemFET arrays are versatile, reproducible, and most likely adaptable to other systems where SNW arrays are required.

Klíčová slova

ChemFET nanosensors, Nanowires, Nanoelectrodes, Gas sensors

Autoři

CHMELA, O.; GABLECH, I.; SADÍLEK, J.; BRODSKÝ, J.; VALLEJOS VARGAS, S.

Vydáno

13. 4. 2023

Nakladatel

Springer

Místo

Nano Research

ISSN

1998-0124

Periodikum

NANO RES

Ročník

16

Číslo

4

Stát

Čínská lidová republika

Strany od

10244

Strany do

110234

Strany počet

11

URL

https://www.sciopen.com/article/pdf/10.1007/s12274-023-5642-x.pdf

Plný text v Digitální knihovně

http://hdl.handle.net/11012/245223

BibTex

@article{BUT183041,
  author="Ondřej {Chmela} and Imrich {Gablech} and Jakub {Sadílek} and Jan {Brodský} and Stella {Vallejos Vargas}",
  title="ChemFET gas nanosensor arrays with alignment windows for assembly of single nanowires",
  journal="NANO RES",
  year="2023",
  volume="16",
  number="4",
  pages="10244--110234",
  doi="10.1007/s12274-023-5642-x",
  issn="1998-0124",
  url="https://www.sciopen.com/article/pdf/10.1007/s12274-023-5642-x.pdf"
}