Přístupnostní navigace
E-přihláška
Vyhledávání Vyhledat Zavřít
Detail publikace
NEČAS, D. YACOOT, A. VALTR, M. KLAPETEK, P.
Originální název
Demystifying data evaluation in the measurement of periodic structures
Typ
článek v časopise ve Web of Science, Jimp
Jazyk
angličtina
Originální abstrakt
Periodic structures are often found in various areas of nanoscience and nanotechnology with many of them being used for metrological purposes either to calibrate instruments, or forming the basis of measuring devices such as encoders. Evaluating the period of one or two-dimensional periodic structures from topography measurements, e.g. performed using scanning probe microscopy, can be achieved using different methodologies with many grating evaluation methods having been proposed in the past and applied to a handful of examples. The optimum methodology for determining the grating period/pitch is not immediately obvious. This paper reports the results of extensive large-scale simulations and analysis to evaluate the performance of both direct and Fourier space data processing methods. Many thousands of simulations have been performed on a variety of different gratings under different measurement conditions and including the simulation of defects encountered in real life situations. The paper concludes with a summary of the merits and disadvantages of the methods together with practical recommendations for the measurements of periodic structures and for developing algorithms for processing them.
Klíčová slova
scanning probe microscopy; data processing; traceability; grating pitch; nanometrology; uncertainty
Autoři
NEČAS, D.; YACOOT, A.; VALTR, M.; KLAPETEK, P.
Vydáno
1. 5. 2023
Nakladatel
IOP Publishing
Místo
BRISTOL
ISSN
1361-6501
Periodikum
Measurement Science and Technology
Ročník
34
Číslo
5
Stát
Spojené království Velké Británie a Severního Irska
Strany od
1
Strany do
21
Strany počet
URL
https://iopscience.iop.org/article/10.1088/1361-6501/acbab3
Plný text v Digitální knihovně
http://hdl.handle.net/11012/213690
BibTex
@article{BUT183772, author="David {Nečas} and Andrew {Yacoot} and Miroslav {Valtr} and Petr {Klapetek}", title="Demystifying data evaluation in the measurement of periodic structures", journal="Measurement Science and Technology", year="2023", volume="34", number="5", pages="1--21", doi="10.1088/1361-6501/acbab3", issn="1361-6501", url="https://iopscience.iop.org/article/10.1088/1361-6501/acbab3" }