Detail publikace

Multi-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theory

ŠULC, V. VOHÁNKA, J. OHLÍDAL, I. KLAPETEK, P. OHLÍDAL, M. KAUR, N. VIŽĎA, F.

Originální název

Multi-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theory

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Angle-resolved scattering was measured for four samples of silicon exhibiting different surface roughnesses. The measurements were performed for three wavelengths: 457.9 nm, 514.5 nm, and 647.1 nm. Three approaches were used to evaluate the experimental data. The first approach corresponds to the exact formula derived using the scalar diffraction theory. This formula is quite complicated, and numerical methods must be used for its evaluation. For this reason, another two approaches representing approximations by much simpler formulae were considered. The use of several wavelengths allowed us not only to recover the power spectral density function in a limited interval of spatial frequencies but also to determine the total rms values of the heights, which represent the quantity of roughness for all spatial frequencies. The possibility of recovering the total rms values of the heights using the multi-wavelength approach is the most important result of this work. The results obtained from the scattering experiment and atomic force microscopy are compared.

Klíčová slova

roughness; scalar diffraction theory; angle-resolved scattering

Autoři

ŠULC, V.; VOHÁNKA, J.; OHLÍDAL, I.; KLAPETEK, P.; OHLÍDAL, M.; KAUR, N.; VIŽĎA, F.

Vydáno

27. 10. 2023

Nakladatel

MDPI

Místo

BASEL

ISSN

2079-6412

Periodikum

Coatings, MDPI

Ročník

13

Číslo

11

Stát

Švýcarská konfederace

Strany počet

15

URL

https://www.mdpi.com/2079-6412/13/11/1853

Plný text v Digitální knihovně

http://hdl.handle.net/11012/245087

BibTex

@article{BUT187201,
  author="Václav {Šulc} and Jíří {Vohánka} and Ivan {Ohlídal} and Petr {Klapetek} and Miloslav {Ohlídal} and Nupinder Jeet {Kaur} and František {Vižďa}",
  title="Multi-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theory",
  journal="Coatings, MDPI",
  year="2023",
  volume="13",
  number="11",
  pages="15",
  doi="10.3390/coatings13111853",
  issn="2079-6412",
  url="https://www.mdpi.com/2079-6412/13/11/1853"
}