Detail publikace

Mathematical-Physics Analyses of the Nozzle Shaping at the Aperture Gas Outlet into Free Space under ESEM Pressure Conditions

ŠABACKÁ, P. MAXA, J. ŠVECOVÁ, J. TALÁR, J. BINAR, T. BAYER, R. BAČA, P. DOSTALOVÁ, P. ŠVARC, J.

Originální název

Mathematical-Physics Analyses of the Nozzle Shaping at the Aperture Gas Outlet into Free Space under ESEM Pressure Conditions

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

The paper presents a methodology that combines experimental measurements and mathematical-physics analyses to investigate the flow behavior in a nozzle-equipped aperture associated with the solution of its impact on electron beam dispersion in an environmental scanning electron microscope (ESEM). The shape of the nozzle significantly influences the character of the supersonic flow beyond the aperture, especially the shape and type of shock waves, which are highly dense compared to the surrounding gas. These significantly affect the electron scattering, which influences the resulting image. This paper analyzes the effect of aperture and nozzle shaping under specific low-pressure conditions and its impact on the electron dispersion of the primary electron beam.

Klíčová slova

Ansys Fluent; ESEM; critical flow; nozzle; CFD; electron dispersion; shock wave

Autoři

ŠABACKÁ, P.; MAXA, J.; ŠVECOVÁ, J.; TALÁR, J.; BINAR, T.; BAYER, R.; BAČA, P.; DOSTALOVÁ, P.; ŠVARC, J.

Vydáno

26. 5. 2024

Nakladatel

MDPI

Místo

BASEL

ISSN

1424-8220

Periodikum

SENSORS

Ročník

24

Číslo

11

Stát

Švýcarská konfederace

Strany od

1

Strany do

26

Strany počet

26

URL

https://www.mdpi.com/1424-8220/24/11/3436

Plný text v Digitální knihovně

http://hdl.handle.net/11012/249351

BibTex

@article{BUT188700,
  author="Pavla {Šabacká} and Jiří {Maxa} and Jana {Švecová} and Jaroslav {Talár} and Tomáš {Binar} and Robert {Bayer} and Petr {Bača} and Petra {Dostalová} and Jiří {Švarc}",
  title="Mathematical-Physics Analyses of the Nozzle Shaping at the Aperture Gas Outlet into Free Space under ESEM Pressure Conditions",
  journal="SENSORS",
  year="2024",
  volume="24",
  number="11",
  pages="1--26",
  doi="10.3390/s24113436",
  issn="1424-8220",
  url="https://www.mdpi.com/1424-8220/24/11/3436"
}