Detail publikace

Influence of Deposition Parameters on the Plasmonic Properties of Gold Nanoantennas Fabricated by Focused Ion Beam Lithography

FOLTÝN, M. PATOČKA, M. ŘEPA, R. ŠIKOLA, T. HORÁK, M.

Originální název

Influence of Deposition Parameters on the Plasmonic Properties of Gold Nanoantennas Fabricated by Focused Ion Beam Lithography

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

The behavior of plasmonic antennas is influenced by a variety of factors, including their size, shape, and material. Even minor changes in the deposition parameters during the thin film preparation process may have a significant impact on the dielectric function of the film, and thus on the plasmonic properties of the resulting antenna. In this work, we deposited gold thin films with thicknesses of 20, 30, and 40 nm at various deposition rates using an ion-beam-assisted deposition. We evaluate their morphology and crystallography by atomic force microscopy, X-ray diffraction, and transmission electron microscopy. Next, we examined the ease of fabricating plasmonic antennas using focused-ion-beam lithography. Finally, we evaluate their plasmonic properties by electron energy loss spectroscopy measurements of individual antennas. Our results show that the optimal gold thin film for plasmonic antenna fabrication of a thickness of 20 and 30 nm should be deposited at the deposition rate of around 0.1 nm/s. The thicker 40 nm film should be deposited at a higher deposition rate like 0.3 nm/s.

Klíčová slova

Antennas; Deposition; Grain; Plasmonics; Thin Films

Autoři

FOLTÝN, M.; PATOČKA, M.; ŘEPA, R.; ŠIKOLA, T.; HORÁK, M.

Vydáno

20. 8. 2024

Nakladatel

AMER CHEMICAL SOC

Místo

WASHINGTON

ISSN

2470-1343

Periodikum

ACS OMEGA

Ročník

9

Číslo

35

Stát

Spojené státy americké

Strany od

37408

Strany do

37416

Strany počet

9

URL

https://pubs.acs.org/doi/10.1021/acsomega.4c06598

Plný text v Digitální knihovně

http://hdl.handle.net/11012/249514

BibTex

@article{BUT189679,
  author="Michael {Foltýn} and Marek {Patočka} and Rostislav {Řepa} and Tomáš {Šikola} and Michal {Horák}",
  title="Influence of Deposition Parameters on the Plasmonic Properties of Gold Nanoantennas Fabricated by Focused Ion Beam Lithography",
  journal="ACS OMEGA",
  year="2024",
  volume="9",
  number="35",
  pages="37408--37416",
  doi="10.1021/acsomega.4c06598",
  issn="2470-1343",
  url="https://pubs.acs.org/doi/10.1021/acsomega.4c06598"
}