Detail publikace

Stitching accuracy in large area scanning probe microscopy

KLAPETEK, P. NEČAS, D. HEAPS, E. SAUVET, B. KLAPETEK, V. VALTR, M. KORPELAINEN, V. YACOOT, A.

Originální název

Stitching accuracy in large area scanning probe microscopy

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Image stitching is a technique that can significantly enlarge the scan area of scanning probe microscope (SPM) images. It is also the most commonly used method to cover large areas in high-speed SPM. In this paper, we provide details on stitching algorithms developed specifically to mitigate the effects of SPM error sources, namely the presence of scanner non-flatness. Using both synthetic data and flat samples we analyse the potential uncertainty contributions related to stitching, showing that the drift and line mismatch are the dominant sources of uncertainty. We also present the 'flatten base' algorithm that can significantly improve the stitched data results, at the cost of losing the large area form information about the sample.

Klíčová slova

SPM; stitching; uncertainty; data processing

Autoři

KLAPETEK, P.; NEČAS, D.; HEAPS, E.; SAUVET, B.; KLAPETEK, V.; VALTR, M.; KORPELAINEN, V.; YACOOT, A.

Vydáno

4. 10. 2024

Nakladatel

IOP Publishing Ltd

Místo

BRISTOL

ISSN

1361-6501

Periodikum

Measurement Science and Technology

Ročník

35

Číslo

12

Stát

Spojené království Velké Británie a Severního Irska

Strany od

125026

Strany do

125037

Strany počet

12

URL

https://iopscience.iop.org/article/10.1088/1361-6501/ad7a13

BibTex

@article{BUT193388,
  author="Petr {Klapetek} and David {Nečas} and Edward {Heaps} and Bruno {Sauvet} and Vojtěch {Klapetek} and Miroslav {Valtr} and Virpi {Korpelainen} and Andrew {Yacoot}",
  title="Stitching accuracy in large area scanning probe microscopy",
  journal="Measurement Science and Technology",
  year="2024",
  volume="35",
  number="12",
  pages="125026--125037",
  doi="10.1088/1361-6501/ad7a13",
  issn="1361-6501",
  url="https://iopscience.iop.org/article/10.1088/1361-6501/ad7a13"
}