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KONVALINA, I. MÜLLEROVÁ, I. FRANK, L.
Originální název
The collection efficiency of the Everhart-Thornley detector of secondary electrons in SEM.
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
The Everhart-Thornley (ET) type detector is widely used in SEM for the collection of secondary electrons (SE). At first glance the electrostatic field of the front grid, biased to a positive potential of several hundred volts, might be thought to attract all SE of a kinetic energy below 50 eV or at least near the SE spectrum peak at 1 - 3 eV. However, the detection quantum efficiency (DQE) of such detectors has been found to be significantly lower than one. The DQE depends heavily on the collection efficiency (CE), i.e. the proportion of emitted species that impact on the detector. Preliminary simulations of electron trajectories indicated CE values for the ET detector even below 10 % for small working distances and more detailed results are reported here.
Klíčová slova
scanning electron microscope, collection efficiency, secondary electrons
Autoři
KONVALINA, I.; MÜLLEROVÁ, I.; FRANK, L.
Vydáno
22. 8. 2004
Místo
Antwerpy
Strany od
79
Strany do
80
Strany počet
2
BibTex
@inproceedings{BUT21737, author="Ivo {Konvalina} and Ilona {Müllerová} and Luděk {Frank}", title="The collection efficiency of the Everhart-Thornley detector of secondary electrons in SEM.", booktitle="EMC 2004 - Proceedings of the 13th European Microscopy Congress", year="2004", pages="2", address="Antwerpy" }