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SUTORÝ, T. KOLKA, Z.
Originální název
C-V Characterization of Nonlinear Capacitors Using CBCM Method
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
The paper deals with a modification of CBCM (Charge-Based Capacitance Measurements) for nonlinear capacitance characterization. The method is characterized by high resolution although it is based on equipment found in any average laboratory. CBCM was originally developed for linear interconnect measurements. The proposed modification uses two DC swept sources to measure the whole nonlinear Q-v characteristic in both polarities without the necessity to switch the measured object. A test-chip implementing the method was designed and manufactured in 0.35μm CMOS process. Verification against known capacitances proved the method correctness and accuracy. It was successfully used for MOSCAPs characterization in full operating voltage range.
Klíčová slova
Microelectronics, CBCM, testing
Autoři
SUTORÝ, T.; KOLKA, Z.
Rok RIV
2007
Vydáno
21. 6. 2007
Nakladatel
Technical University of Lodz
Místo
Lodž, Poland
ISBN
83-922632-9-4
Kniha
Proceedings of the 14th International Conference Mixed Design of Integrated Circuits and Systems 2007
Strany od
501
Strany do
505
Strany počet
5
BibTex
@inproceedings{BUT23667, author="Tomáš {Sutorý} and Zdeněk {Kolka}", title="C-V Characterization of Nonlinear Capacitors Using CBCM Method", booktitle="Proceedings of the 14th International Conference Mixed Design of Integrated Circuits and Systems 2007", year="2007", pages="5", publisher="Technical University of Lodz", address="Lodž, Poland", isbn="83-922632-9-4" }