Detail publikace

Gas Pressure Sensor Based on PECVD Grown Carbon Nanotubes

FICEK, R. ELIÁŠ, M. ZAJÍČKOVÁ, L. JAŠEK, O. VRBA, R.

Originální název

Gas Pressure Sensor Based on PECVD Grown Carbon Nanotubes

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

In this paper the development and fabrication of the pressure sensor based on electron field emission from carbon nanotubes (CNTs) was described. The sensor consisted of two parts: a silicon membrane as an anode; and multi-walled CNTs on a silicon cathode, creating a vacuum micro-chamber. Both electrodes were fabricated from the silicon single crystal (Si) wafer of an orientation <100> doped by phosphorus. The CNTs were grown by a plasma enhanced CVD using an iron catalyst in an atmospheric pressure microwave torch. The catalyst was patterned into an area corresponding to the membrane dimensions. The thin CNTs with a diameter of about 80 nm were standing vertically perpendicular to the substrate due to a crowding effect. In order to find the threshold current, the emission characteristics of prepared sensors were measured.

Klíčová slova

CNTs, Field Emission, Pressure Sensor

Autoři

FICEK, R.; ELIÁŠ, M.; ZAJÍČKOVÁ, L.; JAŠEK, O.; VRBA, R.

Rok RIV

2007

Vydáno

1. 1. 2007

Nakladatel

Material Research Society

Místo

San Francisco

Strany od

1

Strany do

4

Strany počet

4

BibTex

@inproceedings{BUT23966,
  author="Richard {Ficek} and Marek {Eliáš} and Lenka {Zajíčková} and Ondřej {Jašek} and Radimír {Vrba}",
  title="Gas Pressure Sensor Based on PECVD Grown Carbon Nanotubes",
  booktitle="MRS Proceedings Volume 1018E",
  year="2007",
  pages="4",
  publisher="Material Research Society",
  address="San Francisco"
}