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TRIVEDI, R. ŠKODA, D. ČECH, V.
Originální název
AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
The study of surface morphology and mechanical properties of plasma polymer films was carried out. The film was prepared from tetravinylsilane monomer by plasma-enhanced chemical vapor deposition (PECVD) employing an RF helical coupling system. The RF power and deposition time were varied for the deposited films of around 1 micron thickness, which was measured by spectroscopic ellipsometry.
Klíčová slova
plasma polymerization, surface morphology, AFM, nanoindentation
Autoři
TRIVEDI, R.; ŠKODA, D.; ČECH, V.
Rok RIV
2007
Vydáno
13. 12. 2007
Strany od
1
Strany do
2
Strany počet
BibTex
@inproceedings{BUT28347, author="Rutul Rajendra {Trivedi} and David {Škoda} and Vladimír {Čech}", title="AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer", booktitle="New Perspectives of Plasma Science and Technology (CD medium)", year="2007", pages="1--2" }