Detail publikace

Humidity Determination in Environmental SEM

ŠPINKA, J.

Originální název

Humidity Determination in Environmental SEM

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Possibilities of humidity adjustment and measurement in the specimen chamber of the environmental scanning electron microscope (ESEM) at low pressure are described. Optimal pumpdown sequence and filling-in of water vapors to the specimen chamber problems are solved simultaneously.

Klíčová slova

ESEM, humidity measurement, pumpdown sequence

Autoři

ŠPINKA, J.

Rok RIV

2007

Vydáno

17. 1. 2007

Nakladatel

Czechoslovak Microscopy Society

Místo

České Budějovice

ISBN

978-80-239-9397-4

Kniha

Procedings 8th Multinational Congress on Microscopy , June 17-21,2007, Praque

Strany od

107

Strany do

108

Strany počet

2

BibTex

@inproceedings{BUT28446,
  author="Jiří {Špinka}",
  title="Humidity Determination in Environmental SEM",
  booktitle="Procedings 8th Multinational Congress on Microscopy , June 17-21,2007, Praque",
  year="2007",
  pages="107--108",
  publisher="Czechoslovak Microscopy Society",
  address="České Budějovice",
  isbn="978-80-239-9397-4"
}