Detail publikace

Deposition of Carbon Nanotubes in Microwave Torch at Atmospheric Pressure

PEKÁREK, J. VRBA, R. FICEK, R.

Originální název

Deposition of Carbon Nanotubes in Microwave Torch at Atmospheric Pressure

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Carbon nanotubes are new material with unique electrical and mechanical properties. Most of these properties of carbon nanotubes depend on their diameters and chiralities. The depositions were carried out on silicon single crystal (Si) wafer of the orientation <100> doped by phosphorus. Substrates were coated with a thin iron catalytic layer which was vacuum-evaporated to a thickness in the range of 10 nm into the size of 5x5 mm2. Using methane as carbon resource, hydrogen as carrier, carbon nanotubes were synthesized by microwave plasma enhanced chemical vapor deposition (PECVD) at atmospheric pressure. Samples were analyzed by scanning electron microscopy (SEM).

Klíčová slova

carbon nanotubes, plasma enhanced chemical vapor deposition, electron microscopy

Autoři

PEKÁREK, J.; VRBA, R.; FICEK, R.

Rok RIV

2008

Vydáno

10. 9. 2008

Nakladatel

Ing. Zdeněk Novotný, CSc.

Místo

Brno

ISBN

978-80-214-3717-3

Kniha

Electronic Devices and Systems EDS'08 IMAPS CS International Conference 2008

Číslo edice

2

Strany od

566

Strany do

569

Strany počet

4

BibTex

@inproceedings{BUT31418,
  author="Jan {Pekárek} and Radimír {Vrba} and Richard {Ficek}",
  title="Deposition of Carbon Nanotubes in Microwave Torch at Atmospheric Pressure",
  booktitle="Electronic Devices and Systems EDS'08 IMAPS CS International Conference 2008",
  year="2008",
  number="2",
  pages="566--569",
  publisher="Ing. Zdeněk Novotný, CSc.",
  address="Brno",
  isbn="978-80-214-3717-3"
}